Patent Assignment Details
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| Reel/Frame: | 008217/0175 | |
| Pages: | 3 |
| | Recorded: | 11/12/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/16/1997
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Application #:
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08679428
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Filing Dt:
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07/08/1996
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Title:
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METHODS AND TEST STRUCTURES FOR MEASURING OVERLAY IN MULTILAYER DEVICES
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Assignee
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| 14TH AND CONSTITUTION |
| WASHINGTON, DISTRICT OF COLUMBIA 20230 |
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Correspondence name and address
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NATIONAL INSTITUE OF
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STANDARDS AND TECHNOLOGY
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MARCIA SALKELD
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BUILDING 820, ROOM 213
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GAITHERSBURG, MD 20899
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