Patent Assignment Details
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| Reel/Frame: | 008439/0176 | |
| Pages: | 3 |
| | Recorded: | 02/03/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/31/1999
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Application #:
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08794698
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Filing Dt:
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02/03/1997
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Title:
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METHOD FOR REDUCING PARTICLES DEPOSITED ONTO A SEMICONDUCTOR WAFER DURING PLASMA PROCESSING
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Assignee
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| 1303 EAST ALGONQUIN ROAD |
| SCHAUMBURG, ILLINOIS 60196 |
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Correspondence name and address
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MOTOROLA, INC.
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505 BARTON SPRINGS ROAD
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SUITE 500, MD: TX07/F4
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AUSTIN, TEXAS 78704
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