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Patent Assignment Details
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Reel/Frame:031580/0176   Pages: 6
Recorded: 11/12/2013
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
13335889
Filing Dt:
12/22/2011
Publication #:
Pub Dt:
06/27/2013
Title:
PLASMA GENERATING APPARATUS AND PROCESS FOR SIMULTANEOUS EXPOSURE OF A WORKPIECE TO ELECTROMAGNETIC RADIATION AND PLASMA
Assignors
1
Exec Dt:
12/21/2011
2
Exec Dt:
12/23/2011
Assignee
1
108 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondence name and address
CANTOR COLBURN LLP
1180 PEACHTREE STREET, N.E.
SUITE 2050
ATLANTA, GA 30309

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