Patent Assignment Details
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Reel/Frame: | 042871/0179 | |
| Pages: | 3 |
| | Recorded: | 06/30/2017 | | |
Attorney Dkt #: | AGX-242 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/03/2020
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Application #:
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15582896
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Filing Dt:
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05/01/2017
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Publication #:
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Pub Dt:
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06/14/2018
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Title:
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Atomic Layer Etch Process Using Plasma In Conjunction With A Rapid Thermal Activation Process
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Assignee
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47131 BAYSIDE PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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DORITY & MANNING, PA
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PO BOX 1449
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GREENVILLE, SC 29602
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05/25/2024 09:10 AM
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