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01/13/2009
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01/21/2010
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04/30/2009
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11/05/2009
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NONE
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12433589
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04/30/2009
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11/05/2009
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06/21/2011
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12576267
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10/09/2009
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04/01/2010
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ARRANGEMENT AND METHOD FOR CONTROLLING A MICROMECHANICAL ELEMENT
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10/14/2014
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12614929
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05/13/2010
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Title:
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06/19/2012
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12818293
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06/18/2010
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01/06/2011
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BINARY LOGIC UTILIZING MEMS DEVICES
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07/16/2013
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12862036
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08/24/2010
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02/24/2011
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05/27/2014
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04/07/2011
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MICROMECHANICAL DIGITAL CAPACITOR WITH IMPROVED RF HOT SWITCHING PERFORMANCE AND RELIABILITY
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02/28/2012
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09/01/2011
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04/28/2015
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09/20/2011
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03/22/2012
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08/20/2013
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01/13/2012
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07/19/2012
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12/30/2014
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08/02/2012
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02/07/2013
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ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
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05/10/2016
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06/13/2013
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12/19/2013
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MEMS LIFETIME ENHANCEMENT
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07/22/2014
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13941851
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07/15/2013
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02/06/2014
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FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
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12/30/2014
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07/19/2013
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11/14/2013
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06/21/2016
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04/15/2014
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08/07/2014
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11/20/2014
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03/05/2019
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05/09/2014
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08/28/2014
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07/07/2015
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04/18/2014
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10/09/2014
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Title:
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RF MEMS ISOLATION, SERIES AND SHUNT DVC, AND SMALL MEMS
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NONE
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14278901
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05/15/2014
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11/20/2014
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TECHNIQUES FOR THE CANCELLATION OF CHIP SCALE PACKAGING PARASITIC LOSSES
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07/18/2017
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14342387
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04/15/2014
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10/09/2014
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MEMS DEVICE ANCHORING
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10/27/2015
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14352057
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04/15/2014
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09/04/2014
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Title:
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IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDIATE DIELECTRICS LAYERS FOR SUBSEQUENT THERMAL DIFFUSION RELEASE
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09/13/2016
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14420152
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02/06/2015
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08/20/2015
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VARIABLE CAPACITOR COMPROMISING MEMS DEVICES FOR RADIO FREQUENCY APPLICATIONS
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07/18/2017
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14779542
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09/23/2015
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02/25/2016
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MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY
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07/18/2017
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14779564
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09/23/2015
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02/25/2016
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Title:
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CONTROL-ELECTRODE SHIELDING FOR IMPROVED LINEARITY OF A MEMS DVC DEVICE
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07/05/2016
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14783281
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10/08/2015
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03/03/2016
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TWO-STATE CHARGE-PUMP CONTROL-LOOP FOR MEMS DVC CONTROL
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04/17/2018
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11/04/2015
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03/10/2016
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METHOD AND TECHNIQUE TO CONTROL MEMS DVC CONTROL WAVEFORM FOR LIFETIME ENHANCEMENT
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NONE
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14889629
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11/06/2015
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07/07/2016
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ELECTROSTATIC DAMPING OF MEMS DEVICES
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07/24/2018
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14895182
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12/01/2015
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04/28/2016
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NON-SYMMETRIC ARRAYS OF MEMS DIGITAL VARIABLE CAPACITOR WITH UNIFORM OPERATING CHARACTERISTICS
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09/05/2017
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14898678
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12/15/2015
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05/05/2016
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Title:
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STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC)
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10/15/2019
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14899040
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12/16/2015
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05/12/2016
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ANTENNA EFFICIENCY ENHANCEMENT BY ACTIVE DETUNING OF DIVERSITY ANTENNA
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02/18/2020
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14904855
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01/13/2016
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06/16/2016
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DVC UTILIZING MEMS RESISTIVE SWITCHES AND MIM CAPACITORS
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05/28/2019
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14914071
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02/24/2016
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07/14/2016
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RF MEMS ELECTRODES WITH LIMITED GRAIN GROWTH
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11/08/2016
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14914504
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02/25/2016
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07/21/2016
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METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE
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11/07/2017
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14916015
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03/02/2016
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07/28/2016
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07/24/2018
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14916884
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03/04/2016
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10/13/2016
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INTERNALLY GENERATED DFT STEPPED HYSTERESIS SWEEP FOR ELECTROSTATIC MEMS
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07/18/2017
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03/25/2016
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08/18/2016
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CURVED RF ELECTRODE FOR IMPROVED CMAX
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03/06/2018
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03/25/2016
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08/04/2016
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METHOD FOR ACHIEVING GOOD ADHESION BETWEEN DIELECTRIC AND ORGANIC MATERIAL
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NONE
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15301262
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09/30/2016
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01/19/2017
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DEVICE WITH VARIABLE FREQUENCY FILTER FOR REJECTING HARMONICS
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03/05/2019
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15301277
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09/30/2016
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01/19/2017
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07/31/2018
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04/05/2017
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08/31/2017
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POWER AMPLIFIER MATCHING CIRCUIT WITH DVCS
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12/25/2018
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15548992
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08/04/2017
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02/01/2018
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DVC UTILIZING MIMS IN THE ANCHOR
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09/17/2019
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15571234
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11/01/2017
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09/27/2018
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METHOD AND APPARATUS OF MAINTAINING CONSTANT ANTENNA RESONANT FREQUENCY AND IMPEDANCE MATCH IN THE PRESENCE OF ENVIRONMENTAL CHANGES AND HEAD/HAND EFFECT USING VARIABLE REACTANCE ANTENNA APERTURE TUNERS
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09/03/2019
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15629161
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06/21/2017
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10/05/2017
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METHOD OF MANUFACTURING A MEMS DVC DEVICE
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09/07/2021
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15770698
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04/24/2018
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02/28/2019
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THERMAL MANAGEMENT IN HIGH POWER RF MEMS SWITCHES
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02/18/2020
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04/24/2018
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11/01/2018
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MEMS RF-SWITCH WITH CONTROLLED CONTACT LANDING
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01/19/2021
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04/25/2018
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10/25/2018
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07/07/2020
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04/25/2018
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11/01/2018
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10/18/2022
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04/27/2018
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11/01/2018
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03/30/2021
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04/30/2018
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02/28/2019
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03/17/2020
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01/14/2019
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05/16/2019
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10/04/2022
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01/08/2019
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08/27/2020
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08/18/2020
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04/17/2019
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02/06/2020
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08/16/2022
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04/22/2019
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06/11/2020
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MEMS RF-SWITCH WITH NEAR-ZERO IMPACT LANDING
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