Patent Assignment Details
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Reel/Frame: | 014883/0185 | |
| Pages: | 3 |
| | Recorded: | 01/09/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10753557
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Filing Dt:
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01/09/2004
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Publication #:
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Pub Dt:
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07/29/2004
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Title:
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TAILORED REFLECTING DIFFRACTOR FOR EUV LITHOGRAPHIC SYSTEM ABERRATION MEASUREMENT
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Assignee
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DE RUN 1110 |
5503 LA VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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STERNE KESSLER, GOLDSTEIN & FOX PLLC
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GEORGE S. BARDMESSEER
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1100 NEW YORK, AVENUE N.W.
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WASHINGTON, DC 20005-3934
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