Patent Assignment Details
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| Reel/Frame: | 011494/0190 | |
| Pages: | 3 |
| | Recorded: | 01/23/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09766643
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Filing Dt:
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01/23/2001
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Publication #:
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Pub Dt:
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07/25/2002
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Title:
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System and method for status settings of semiconductor equipment with multi chambers
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Assignee
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| NO. 3, LI-HSIN ROAD, 2, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU CITY TAIWAN, CHINA |
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Correspondence name and address
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LOWE HAUPTMAN GILMAN & BERNER
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BENJAMIN J. HAUPTMAN
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1700 DIAGONAL ROAD, SUITE 310
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ALEXANDRIA, VA 22314
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