Patent Assignment Details
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| Reel/Frame: | 006546/0201 | |
| Pages: | 4 |
| | Recorded: | 04/09/1993 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/23/1995
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Application #:
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07998149
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Filing Dt:
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12/29/1992
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Title:
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THREE-ZONE RAPID THERMAL PROCESSING SYSTEM UTILIZING WAFER EDGE HEATING MEANS
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Assignee
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| YARBOROUGH DRIVE |
| RALEIGH, NORTH CAROLINA 27695 |
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Correspondence name and address
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MITCHELL S. BIGEL
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BELL, SELTZER, PARK & GIBSON
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P.O. DRAWER 34009
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CHARLOTTE, NC 28234
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