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Patent #:
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Issue Dt:
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08/14/2012
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Application #:
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11990340
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Filing Dt:
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02/27/2008
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Publication #:
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Pub Dt:
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05/14/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/15/2012
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Application #:
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11990445
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Filing Dt:
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12/12/2008
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Publication #:
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Pub Dt:
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06/18/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/03/2010
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Application #:
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11990451
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Filing Dt:
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08/14/2008
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Publication #:
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Pub Dt:
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04/23/2009
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Title:
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SEMICONDUCTOR DEVICE PRODUCING METHOD
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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11990499
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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12/11/2008
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Title:
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SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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01/04/2011
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Application #:
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11990519
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Filing Dt:
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02/15/2008
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS FOR USE IN THE SAME, METHOD OF MANUFACTURING SEMICONDUCTORS WITH THOSE APPARATUSES, AND HEATING ELEMENT SUPPORTING STRUCTURE
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Patent #:
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Issue Dt:
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05/08/2012
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Application #:
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11990696
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Filing Dt:
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02/20/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING METHOD
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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12010274
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Filing Dt:
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01/23/2008
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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SUBSTRATE PROCESSING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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12039686
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Filing Dt:
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02/28/2008
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Publication #:
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Pub Dt:
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07/03/2008
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Title:
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SUBSTRATE PROCESSING METHOD FOR FILM FORMATION
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12060511
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Filing Dt:
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04/01/2008
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Publication #:
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Pub Dt:
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10/09/2008
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR APPARATUS
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12073787
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Filing Dt:
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03/10/2008
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Publication #:
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Pub Dt:
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09/18/2008
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12076508
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Filing Dt:
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03/19/2008
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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12076824
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Filing Dt:
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03/24/2008
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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SUBSTRATE PROCESSING SYSTEM AND GROUP MANAGEMENT SYSTEM
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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12078188
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Filing Dt:
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03/27/2008
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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SUBSTRATE PROCESSING SYSTEM AND DATA RETRIEVAL METHOD
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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12078527
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Filing Dt:
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04/01/2008
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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07/12/2011
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Application #:
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12081200
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Filing Dt:
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04/11/2008
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Publication #:
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Pub Dt:
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08/14/2008
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Title:
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A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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12084141
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Filing Dt:
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08/13/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/03/2013
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Application #:
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12084886
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Filing Dt:
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07/03/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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12086285
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Filing Dt:
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09/18/2008
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Publication #:
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Pub Dt:
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10/15/2009
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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12086632
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Filing Dt:
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12/16/2008
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Publication #:
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Pub Dt:
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10/15/2009
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Title:
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Substrate Processing Apparatus
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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12087479
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Filing Dt:
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10/01/2008
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Publication #:
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Pub Dt:
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01/29/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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07/19/2011
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Application #:
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12087779
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Filing Dt:
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07/15/2008
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Publication #:
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Pub Dt:
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02/26/2009
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Title:
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SEMICONDUCTOR DEVICE PRODUCING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/30/2010
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Application #:
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12153101
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Filing Dt:
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05/14/2008
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Publication #:
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Pub Dt:
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09/18/2008
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Title:
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SEMICONDUCTOR PRODUCING DEVICE AND SEMICONDUCTOR DEVICE PRODUCING METHOD
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Patent #:
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Issue Dt:
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05/04/2010
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Application #:
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12155221
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Filing Dt:
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05/30/2008
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Publication #:
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Pub Dt:
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12/11/2008
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Title:
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MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/24/2009
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Application #:
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12155625
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Filing Dt:
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06/06/2008
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Publication #:
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Pub Dt:
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10/16/2008
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Title:
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METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12155773
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Filing Dt:
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06/10/2008
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Publication #:
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Pub Dt:
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12/25/2008
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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12/28/2010
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Application #:
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12187644
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Filing Dt:
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08/07/2008
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Publication #:
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Pub Dt:
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02/12/2009
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12201606
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Filing Dt:
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08/29/2008
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Publication #:
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Pub Dt:
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11/12/2009
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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10/02/2012
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Application #:
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12213679
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Filing Dt:
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06/23/2008
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Publication #:
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Pub Dt:
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01/01/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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12213823
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Filing Dt:
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06/25/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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HEATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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11/10/2015
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Application #:
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12213824
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Filing Dt:
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06/25/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
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Patent #:
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Issue Dt:
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04/17/2012
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Application #:
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12213825
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Filing Dt:
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06/25/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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HEATING APPARATUS, SUBSTRATE PROCESSING APPARATUS EMPLOYING THE SAME, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES, AND EXTENDING MEMBER
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Patent #:
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Issue Dt:
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07/09/2013
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12216596
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07/08/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Title:
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/21/2013
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12222653
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08/13/2008
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Publication #:
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Pub Dt:
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02/19/2009
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Title:
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Substrate processing apparatus
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Patent #:
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Issue Dt:
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11/06/2012
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Application #:
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12223718
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Filing Dt:
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08/07/2008
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Publication #:
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Pub Dt:
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04/02/2009
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/06/2011
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Application #:
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12223866
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Filing Dt:
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10/03/2008
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12224436
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Filing Dt:
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08/27/2008
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Publication #:
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Pub Dt:
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04/30/2009
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Title:
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TEMPERATURE ADJUSTMENT METHOD
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12224808
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Filing Dt:
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09/24/2008
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Publication #:
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Pub Dt:
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11/26/2009
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Title:
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SUBSTRATE PROCESSING SYSTEM
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Patent #:
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09/06/2011
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12224858
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09/08/2008
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Publication #:
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Pub Dt:
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01/22/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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12224879
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10/24/2008
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Publication #:
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Pub Dt:
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12/10/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING REMOVAL OF DEPOSITS FROM PROCESS CHAMBER AND SUPPLY PORTION
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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12225118
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Filing Dt:
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10/03/2008
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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DEVICE FOR PROCESSING SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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09/11/2012
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12225390
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10/20/2008
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Pub Dt:
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09/02/2010
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Title:
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SUBSTRATE PROCESSING SYSTEM AND OPERATION INSPECTING METHOD
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09/14/2010
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12225432
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Filing Dt:
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10/20/2008
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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SUBSTRATE TREATMENT DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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09/14/2010
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12226323
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12/01/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Patent #:
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09/27/2011
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12230396
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08/28/2008
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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06/05/2012
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12230782
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09/04/2008
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Pub Dt:
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03/12/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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02/19/2013
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12232007
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09/09/2008
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04/23/2009
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Title:
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TEMPERATURE CONTROL METHOD, METHOD OF OBTAINING A TEMPERATURE CORRECTION VALUE, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE TREATMENT APPARATUS
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02/21/2012
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12253469
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10/17/2008
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04/23/2009
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Title:
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DELAY ADJUSTING METHOD AND LSI THAT USES AIR-GAP WIRING
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12/06/2011
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12255246
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10/21/2008
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05/07/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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02/07/2012
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12260211
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10/29/2008
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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12/17/2013
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Application #:
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12318131
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12/22/2008
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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03/22/2011
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12320357
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01/23/2009
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Publication #:
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Pub Dt:
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06/04/2009
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Title:
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
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12/18/2012
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12320767
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02/04/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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09/20/2011
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12357213
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01/21/2009
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Pub Dt:
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05/28/2009
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Title:
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BATCH-TYPE REMOTE PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/06/2012
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12363045
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Filing Dt:
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01/30/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND PROCESS TUBE
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Patent #:
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Issue Dt:
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10/30/2012
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Application #:
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12363928
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Filing Dt:
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02/02/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/09/2014
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Application #:
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12379420
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Filing Dt:
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02/20/2009
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Publication #:
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Pub Dt:
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09/10/2009
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Title:
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Substrate processing apparatus and method for manufacturing semiconductor device
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Patent #:
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Issue Dt:
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01/02/2018
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Application #:
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12379471
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Filing Dt:
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02/23/2009
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Publication #:
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Pub Dt:
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07/02/2009
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Title:
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Method for manufacturing semiconductor device and substrate processing apparatus
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Patent #:
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Issue Dt:
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10/25/2011
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Application #:
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12382082
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Filing Dt:
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03/09/2009
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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12382222
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Filing Dt:
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03/11/2009
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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Substrate processing apparatus
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Patent #:
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Issue Dt:
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07/17/2012
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Application #:
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12382275
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Filing Dt:
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03/12/2009
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Publication #:
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Pub Dt:
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07/16/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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07/24/2012
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Application #:
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12382276
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Filing Dt:
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03/12/2009
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Publication #:
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Pub Dt:
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07/16/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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11/04/2014
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Application #:
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12382331
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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10/01/2009
| | | | |
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Title:
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Substrate processing apparatus
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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12382343
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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Substrate processing method and film forming method
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Patent #:
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Issue Dt:
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09/18/2012
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Application #:
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12382350
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12382403
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Filing Dt:
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03/16/2009
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Publication #:
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Pub Dt:
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07/16/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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12382545
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Filing Dt:
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03/18/2009
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Publication #:
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Pub Dt:
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07/23/2009
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Title:
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TEMPERATURE REGULATING METHOD, THERMAL PROCESSING SYSTEM AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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12382618
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Filing Dt:
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03/19/2009
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Publication #:
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Pub Dt:
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07/30/2009
| | | | |
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Title:
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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10/01/2013
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Application #:
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12390291
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Filing Dt:
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02/20/2009
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Publication #:
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Pub Dt:
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06/25/2009
| | | | |
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Title:
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BATCH-TYPE REMOTE PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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12403974
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/27/2011
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Application #:
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12404003
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Filing Dt:
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03/13/2009
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/28/2014
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Application #:
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12404915
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Filing Dt:
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03/16/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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PRODUCING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12410836
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Filing Dt:
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03/25/2009
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Publication #:
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Pub Dt:
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10/22/2009
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/14/2010
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Application #:
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12410963
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Filing Dt:
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03/25/2009
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Publication #:
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Pub Dt:
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12/31/2009
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/31/2012
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Application #:
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12415821
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Filing Dt:
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03/31/2009
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Publication #:
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Pub Dt:
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02/09/2012
| | | | |
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Title:
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METHOD OF PRODUCING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12421117
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Filing Dt:
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04/09/2009
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Publication #:
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Pub Dt:
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10/15/2009
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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10/04/2011
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Application #:
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12429462
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Filing Dt:
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04/24/2009
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Publication #:
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Pub Dt:
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02/11/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS, HEATING DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Patent #:
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Issue Dt:
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12/06/2011
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Application #:
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12457493
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Filing Dt:
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06/12/2009
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Publication #:
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Pub Dt:
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12/17/2009
| | | | |
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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02/07/2012
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Application #:
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12457915
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Filing Dt:
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06/25/2009
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Publication #:
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Pub Dt:
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12/31/2009
| | | | |
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/09/2014
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Application #:
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12458096
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Filing Dt:
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06/30/2009
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Publication #:
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Pub Dt:
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11/12/2009
| | | | |
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Title:
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Semiconductor producing device and semiconductor device producing method
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Patent #:
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Issue Dt:
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03/12/2013
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Application #:
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12458903
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Filing Dt:
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07/27/2009
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Publication #:
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Pub Dt:
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02/04/2010
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/08/2012
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Application #:
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12470084
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Filing Dt:
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05/21/2009
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Publication #:
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Pub Dt:
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10/01/2009
| | | | |
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Title:
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SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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06/05/2012
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Application #:
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12502387
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Filing Dt:
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07/14/2009
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Publication #:
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Pub Dt:
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01/21/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD FOR FORMING FILM
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12548066
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Filing Dt:
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08/26/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12551001
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Filing Dt:
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08/31/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12563205
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Filing Dt:
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09/21/2009
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Publication #:
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Pub Dt:
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04/01/2010
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Title:
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SETUP METHOD OF SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/27/2011
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Application #:
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12571706
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Filing Dt:
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10/01/2009
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Publication #:
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Pub Dt:
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04/08/2010
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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12585341
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Filing Dt:
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09/11/2009
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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Substrate processing apparatus and substrate processing method
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Patent #:
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Issue Dt:
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04/12/2011
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Application #:
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12585342
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Filing Dt:
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09/11/2009
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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12605327
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Filing Dt:
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10/24/2009
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Publication #:
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Pub Dt:
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05/27/2010
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Title:
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MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE HAVING WIRINGS
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12618248
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Filing Dt:
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11/13/2009
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Publication #:
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Pub Dt:
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05/27/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/27/2011
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Application #:
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12622816
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Filing Dt:
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11/20/2009
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Publication #:
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Pub Dt:
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05/20/2010
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Title:
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METHOD OF FABRICATING NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE BY USING PLASMA FILM-FORMING METHOD AND PLASMA NITRIDATION
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Patent #:
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Issue Dt:
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12/06/2011
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Application #:
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12637229
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Filing Dt:
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12/14/2009
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Publication #:
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Pub Dt:
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06/17/2010
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12644339
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Filing Dt:
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12/22/2009
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Publication #:
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Pub Dt:
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07/01/2010
| | | | |
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Title:
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SUBSTRATE PROCESSING APPARATUS AND REACTION TUBE FOR PROCESSING SUBSTRATE
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12644370
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Filing Dt:
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12/22/2009
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Publication #:
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Pub Dt:
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07/01/2010
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD AND CLEANING CONTROL APPARATUS
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Patent #:
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Issue Dt:
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11/15/2011
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Application #:
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12652604
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Filing Dt:
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01/05/2010
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Publication #:
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Pub Dt:
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07/08/2010
| | | | |
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Title:
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SEMICONDUCTOR DEVICE PRODUCING METHOD
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Patent #:
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Issue Dt:
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09/03/2013
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Application #:
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12654878
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Filing Dt:
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01/07/2010
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Publication #:
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Pub Dt:
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07/29/2010
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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05/15/2012
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Application #:
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12656415
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Filing Dt:
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01/28/2010
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Publication #:
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Pub Dt:
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12/16/2010
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Title:
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MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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08/23/2011
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Application #:
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12656497
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Filing Dt:
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02/01/2010
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Publication #:
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Pub Dt:
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06/03/2010
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Title:
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DEVICE FOR PROCESSING A SUBSTRATE, METHOD OF PROCESSING A SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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04/23/2013
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Application #:
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12659409
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Filing Dt:
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03/08/2010
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Publication #:
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Pub Dt:
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07/08/2010
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Title:
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SUBSTRATE TREATMENT EQUIPMENT AND MANUFACTURING METHOD OF SUBSTRATE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12659999
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Filing Dt:
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03/26/2010
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Publication #:
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Pub Dt:
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07/29/2010
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Title:
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SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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