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04/28/1987
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06839668
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03/14/1986
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11/27/1990
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07196956
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05/20/1988
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04/17/1990
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09/06/1988
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06/18/1991
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12/05/1988
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04/30/1991
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12/15/1989
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06/14/1994
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07937243
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08/28/1992
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03/14/1995
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08/04/1993
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04/22/1997
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02/27/1995
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10/14/1997
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05/16/1995
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05/26/1998
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12/14/1995
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06/22/1999
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02/15/1996
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07/07/1998
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05/29/1996
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02/23/1999
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06/07/1996
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12/22/1998
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09/06/1996
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07/14/1998
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12/05/1996
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09/21/1999
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12/31/1996
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12/08/1998
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12/31/1996
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11/10/1998
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12/31/1996
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08/10/1999
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05/16/1997
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03/16/1999
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06/06/1997
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11/28/2000
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01/12/1998
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02/06/2001
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07/19/2001
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05/28/1998
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07/26/2001
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07/06/2004
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12/15/1998
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10/15/2002
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07/17/2001
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11/27/2001
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05/07/1999
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12/25/2001
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09/20/1999
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07/23/2002
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10/18/1999
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10/18/1999
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10/18/1999
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04/02/2002
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11/02/1999
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03/26/2002
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04/08/2003
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12/10/2002
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08/15/2002
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11/21/2002
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07/18/2002
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ABATEMENT OF EFFLUENTS FROM CHEMICAL VAPOR DEPOSITION PROCESSES USING ORGANOMETALLICSOURCE REAGENTS
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01/28/2003
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06/27/2001
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12/27/2001
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04/22/2003
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07/23/2001
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02/06/2003
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05/08/2007
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02/14/2002
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11/21/2006
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04/01/2003
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07/18/2002
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07/22/2003
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12/18/2001
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03/13/2003
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05/17/2002
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Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
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03/28/2003
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09/30/2004
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01/18/2005
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04/15/2003
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10/21/2004
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05/01/2003
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11/04/2004
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12/21/2004
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10/23/2002
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03/27/2003
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08/17/2004
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11/13/2002
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04/17/2003
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10/19/2004
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12/09/2002
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06/10/2004
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06/17/2004
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06/15/2004
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07/24/2003
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02/19/2003
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08/19/2004
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Low pressure drop canister for fixed bed scrubber applications and method of using same
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03/05/2003
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09/09/2004
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03/17/2003
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09/23/2004
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Scrubber system for pretreatment of an effluent waste stream containing arsenic
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09/18/2003
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05/27/2004
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09/18/2003
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03/24/2005
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Chemisorbent system for abatement of effluent species
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10693413
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Filing Dt:
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10/24/2003
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Publication #:
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Pub Dt:
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04/28/2005
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Title:
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Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10720398
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Filing Dt:
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11/24/2003
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Publication #:
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Pub Dt:
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05/26/2005
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Title:
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Method and apparatus for the recovery of volatile organic compounds and concentration thereof
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Patent #:
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Issue Dt:
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08/04/2009
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Application #:
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10742126
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Filing Dt:
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12/19/2003
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Publication #:
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Pub Dt:
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06/23/2005
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Title:
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APPARATUS AND METHOD FOR CONTROLLED COMBUSTION OF GASEOUS POLLUTANTS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10849435
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Filing Dt:
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05/19/2004
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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Apparatus for point-of-use treatment of effluent gas streams
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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10928977
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Filing Dt:
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08/27/2004
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Publication #:
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Pub Dt:
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03/17/2005
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Title:
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METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM
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