Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 016226/0212 | |
| Pages: | 3 |
| | Recorded: | 02/03/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
9
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Patent #:
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Issue Dt:
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07/18/1995
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Application #:
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08173294
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Filing Dt:
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12/22/1993
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Title:
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IN-SITU ENDPOINT DETECTION AND PROCESS MONITORING METHOD AND APPARATUS FOR CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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09/24/1996
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Application #:
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08419206
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Filing Dt:
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04/10/1995
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Title:
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IN-SITU MONITORING OF THE CHANGE IN THICKNESS OF FILMS
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08419208
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Filing Dt:
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04/10/1995
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Title:
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IN-SITU MONITORING OF CONDUCTIVE FILMS ON SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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09/02/1997
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Application #:
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08620720
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Filing Dt:
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03/19/1996
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Title:
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ROTARY SIGNAL COUPLING FOR CHEMICAL MECHANICAL POLISHING ENDPOINT DETECTION WITH A WESTECH TOOL
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Patent #:
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Issue Dt:
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08/19/1997
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Application #:
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08620721
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Filing Dt:
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03/19/1996
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Title:
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CHEMICAL MECHANICAL POLISHING ENDPOINT PROCESS CONTROL
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Patent #:
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Issue Dt:
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07/01/1997
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Application #:
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08620722
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Filing Dt:
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03/19/1996
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Title:
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ENDPOINT DETECTION FOR CHEMICAL MECHANICAL POLISHING USING FREQUENCY OR AMPLITUDE MODE
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Patent #:
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Issue Dt:
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06/23/1998
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Application #:
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08620723
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Filing Dt:
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03/19/1996
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Title:
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ROTARY SIGNAL COUPLING FOR CHEMICAL MECHANICAL POLISHING ENDPOINT DETECTION WITH A STRASBAUGH TOOL
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Patent #:
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Issue Dt:
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03/24/1998
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Application #:
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08641470
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Filing Dt:
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05/01/1996
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Title:
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IN-SITU MONITORING OF THE CHANGE IN THICKNESS OF FILMS
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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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08876774
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Filing Dt:
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06/17/1997
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Title:
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IN -SITU MONITORING AND CONTROL FILMS BY DETECTING CHANGES IN INDUCED EDOY CURRENTS
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Assignee
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| 11-1 ASAHI-CHO, HANEDA, OHTA-KU |
| TOKYO 144-8510, JAPAN |
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Correspondence name and address
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WENDEROTH, LIND & PONACK, L.L.P.
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ATTN: NILS E. PEDERSEN, ESQ.
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2033 K STREET, N.W., SUITE 800
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WASHINGTON, DC 20006-1021
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