skip navigationU S P T O SealUnited States Patent and Trademark Office AOTW logo
Home|Site Index|Search|Guides|Contacts|eBusiness|eBiz alerts|News|Help
Assignments on the Web > Patent Query
Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:032745/0216   Pages: 21
Recorded: 04/23/2014
Attorney Dkt #:EUV - BATCH 2
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 26
1
Patent #:
7449703
Issue Dt:
11/11/2008
Application #:
11067073
Filing Dt:
02/25/2005
Publication #:
US20060193997
Pub Dt:
08/31/2006
Title:
METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY TARGET MATERIAL HANDLING
2
Patent #:
7109503
Issue Dt:
09/19/2006
Application #:
11067099
Filing Dt:
02/25/2005
Publication #:
US20060192151
Pub Dt:
08/31/2006
Title:
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
3
Patent #:
7122816
Issue Dt:
10/17/2006
Application #:
11088475
Filing Dt:
03/23/2005
Publication #:
US20060192155
Pub Dt:
08/31/2006
Title:
METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING
4
Patent #:
7217941
Issue Dt:
05/15/2007
Application #:
11148021
Filing Dt:
06/08/2005
Publication #:
US20050279946
Pub Dt:
12/22/2005
Title:
SYSTEMS AND METHODS FOR DEFLECTING PLASMA-GENERATED IONS TO PREVENT THE IONS FROM REACHING AN INTERNAL COMPONENT OF AN EUV LIGHT SOURCE
5
Patent #:
7365349
Issue Dt:
04/29/2008
Application #:
11168190
Filing Dt:
06/27/2005
Publication #:
US20070023705
Pub Dt:
02/01/2007
Title:
EUV LIGHT SOURCE COLLECTOR LIFETIME IMPROVEMENTS
6
Patent #:
7439530
Issue Dt:
10/21/2008
Application #:
11174299
Filing Dt:
06/29/2005
Publication #:
US20070001131
Pub Dt:
01/04/2007
Title:
LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
7
Patent #:
7196342
Issue Dt:
03/27/2007
Application #:
11174442
Filing Dt:
06/29/2005
Publication #:
US20050269529
Pub Dt:
12/08/2005
Title:
SYSTEMS AND METHODS FOR REDUCING THE INFLUENCE OF PLASMA-GENERATED DEBRIS ON THE INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE
8
Patent #:
7372056
Issue Dt:
05/13/2008
Application #:
11174443
Filing Dt:
06/29/2005
Publication #:
US20070001130
Pub Dt:
01/04/2007
Title:
LPP EUV PLASMA SOURCE MATERIAL TARGET DELIVERY SYSTEM
9
Patent #:
7394083
Issue Dt:
07/01/2008
Application #:
11177501
Filing Dt:
07/08/2005
Publication #:
US20070008517
Pub Dt:
01/11/2007
Title:
SYSTEMS AND METHODS FOR EUV LIGHT SOURCE METROLOGY
10
Patent #:
7482609
Issue Dt:
01/27/2009
Application #:
11217161
Filing Dt:
08/31/2005
Publication #:
US20060192152
Pub Dt:
08/31/2006
Title:
LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
11
Patent #:
7141806
Issue Dt:
11/28/2006
Application #:
11237649
Filing Dt:
09/27/2005
Title:
EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION
12
Patent #:
7180083
Issue Dt:
02/20/2007
Application #:
11238828
Filing Dt:
09/28/2005
Publication #:
US20060289808
Pub Dt:
12/28/2006
Title:
EUV LIGHT SOURCE COLLECTOR EROSION MITIGATION
13
Patent #:
7355191
Issue Dt:
04/08/2008
Application #:
11288868
Filing Dt:
11/28/2005
Publication #:
US20060097203
Pub Dt:
05/11/2006
Title:
SYSTEMS AND METHODS FOR CLEANING A CHAMBER WINDOW OF AN EUV LIGHT SOURCE
14
Patent #:
7453077
Issue Dt:
11/18/2008
Application #:
11323397
Filing Dt:
12/29/2005
Publication #:
US20070102653
Pub Dt:
05/10/2007
Title:
EUV LIGHT SOURCE
15
Patent #:
7378673
Issue Dt:
05/27/2008
Application #:
11358983
Filing Dt:
02/21/2006
Publication #:
US20060192153
Pub Dt:
08/31/2006
Title:
SOURCE MATERIAL DISPENSER FOR EUV LIGHT SOURCE
16
Patent #:
7598509
Issue Dt:
10/06/2009
Application #:
11358992
Filing Dt:
02/21/2006
Publication #:
US20060219957
Pub Dt:
10/05/2006
Title:
LASER PRODUCED PLASMA EUV LIGHT SOURCE
17
Patent #:
7518787
Issue Dt:
04/14/2009
Application #:
11452558
Filing Dt:
06/14/2006
Publication #:
US20070291350
Pub Dt:
12/20/2007
Title:
DRIVE LASER FOR EUV LIGHT SOURCE
18
Patent #:
7476886
Issue Dt:
01/13/2009
Application #:
11509925
Filing Dt:
08/25/2006
Publication #:
US20080048133
Pub Dt:
02/28/2008
Title:
SOURCE MATERIAL COLLECTION UNIT FOR A LASER PRODUCED PLASMA EUV LIGHT SOURCE
19
Patent #:
7365351
Issue Dt:
04/29/2008
Application #:
11512821
Filing Dt:
08/30/2006
Publication #:
US20070029512
Pub Dt:
02/08/2007
Title:
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
20
Patent #:
7247870
Issue Dt:
07/24/2007
Application #:
11512822
Filing Dt:
08/30/2006
Publication #:
US20070018122
Pub Dt:
01/25/2007
Title:
SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
21
Patent #:
7732793
Issue Dt:
06/08/2010
Application #:
11705954
Filing Dt:
02/13/2007
Publication #:
US20070187627
Pub Dt:
08/16/2007
Title:
SYSTEMS AND METHODS FOR REDUCING THE INFLUENCE OF PLASMA-GENERATED DEBRIS ON THE INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE
22
Patent #:
7960701
Issue Dt:
06/14/2011
Application #:
12004871
Filing Dt:
12/20/2007
Publication #:
US20090159808
Pub Dt:
06/25/2009
Title:
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
23
Patent #:
7589337
Issue Dt:
09/15/2009
Application #:
12075631
Filing Dt:
03/12/2008
Publication #:
US20080179549
Pub Dt:
07/31/2008
Title:
LPP EUV PLASMA SOURCE MATERIAL TARGET DELIVERY SYSTEM
24
Patent #:
8461560
Issue Dt:
06/11/2013
Application #:
13087207
Filing Dt:
04/14/2011
Publication #:
US20110192995
Pub Dt:
08/11/2011
Title:
LPP EUV LIGHT SOURCE DRIVE LASER SYSTEM
25
Patent #:
8314398
Issue Dt:
11/20/2012
Application #:
13091923
Filing Dt:
04/21/2011
Publication #:
US20110192985
Pub Dt:
08/11/2011
Title:
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
26
Patent #:
8686370
Issue Dt:
04/01/2014
Application #:
13675972
Filing Dt:
11/13/2012
Publication #:
US20130070332
Pub Dt:
03/21/2013
Title:
EUV LIGHT SOURCE COMPONENTS AND METHODS FOR PRODUCING, USING AND REFURBISHING SAME
Assignor
1
CYMER, LLC
Exec Dt:
01/06/2014
Assignee
1
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondence name and address
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, 5500 AH NETHERLANDS

Search Results as of: 06/01/2024 01:38 AM
If you have any comments or questions concerning the data displayed, contact PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified: August 25, 2017 v.2.6
| .HOME | INDEX| SEARCH | eBUSINESS | CONTACT US | PRIVACY STATEMENT