Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 037981/0231 | |
| Pages: | 7 |
| | Recorded: | 03/15/2016 | | |
Attorney Dkt #: | RAY-258US (14-6354) |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/19/2019
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Application #:
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15070384
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Filing Dt:
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03/15/2016
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Publication #:
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Pub Dt:
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09/21/2017
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Title:
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IN-SITU CALIBRATION STRUCTURES AND METHODS OF USE IN SEMICONDUCTOR PROCESSING
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Assignee
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870 WINTER STREET |
WALTHAM, MASSACHUSETTS 02451-1449 |
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Correspondence name and address
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JOSEPH M. MARAIA
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125 SUMMER STREET
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BOSTON, MA 02110
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