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Reel/Frame:059091/0238   Pages: 4
Recorded: 02/24/2022
Attorney Dkt #:TSMC 200042US01
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17679483
Filing Dt:
02/24/2022
Publication #:
Pub Dt:
01/19/2023
Title:
SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
Assignors
1
Exec Dt:
02/21/2022
2
Exec Dt:
02/21/2022
3
Exec Dt:
02/21/2022
4
Exec Dt:
02/21/2022
5
Exec Dt:
02/21/2022
Assignee
1
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK
HSINCHU, TAIWAN 300-78
Correspondence name and address
FAY SHARPE LLP
1228 EUCLID AVE
CLEVELAND, OH 44115

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