Patent Assignment Details
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| Reel/Frame: | 012941/0240 | |
| Pages: | 2 |
| | Recorded: | 06/03/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/06/2003
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Application #:
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09663286
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Filing Dt:
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09/15/2000
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Title:
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SYSTEMS AND METHODS FOR LITHOGRAPHY
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Assignee
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| 13 ALEXANDER ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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FOLEY, HOAG & ELIOT LLP
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WILLIAM D. DEVAUL
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ONE POST OFFICE SQUARE
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BOSTON, MA 02109
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