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Reel/Frame:018509/0241   Pages: 4
Recorded: 11/13/2006
Attorney Dkt #:0055.0018US1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/10/2012
Application #:
11568949
Filing Dt:
11/10/2006
Publication #:
Pub Dt:
10/25/2007
Title:
APPARATUS AND METHOD FOR INSPECTING MICRO-STRUCTURED DEVICES ON A SEMICONDUCTOR SUBSTRATE
Assignors
1
Exec Dt:
10/19/2006
2
Exec Dt:
10/19/2006
Assignee
1
ERNST-LEITZ-STRASSE 17-37
WETZLAR, GERMANY D-35578
Correspondence name and address
MARIA ELISEEVA
4 MILITIA DRIVE, SUITE 4
LEXINGTON, MA 02421

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