Patent Assignment Details
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| Reel/Frame: | 012179/0243 | |
| Pages: | 7 |
| | Recorded: | 09/18/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09955517
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Filing Dt:
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09/18/2001
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Publication #:
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Pub Dt:
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03/20/2003
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Title:
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In-situ or ex-situ profile monitoring of phase openings on alternating phase shifting masks by scatterometry
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Assignee
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| P.O. BOX 3453 |
| ONE AMD PLACE |
| SUNNYVALE, CALIFORNIA 94088 |
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Correspondence name and address
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AMIN & TUROCY, LLP
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HIMANSHU S. AMIN
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24TH FLOOR, NATIONAL CITY CENTER
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1900 E. 9TH STREET
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CLEVELAND, OHIO 44114
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