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Total properties:
12
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09509334
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Filing Dt:
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03/24/2000
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Title:
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METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10380851
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Filing Dt:
|
03/17/2003
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Title:
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SYSTEM FOR FORMING AEROSOLS AND COOLING DEVICE INCORPORATED THEREIN
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Patent #:
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Issue Dt:
|
09/18/2007
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Application #:
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10450430
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Filing Dt:
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06/12/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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APPARATUS FOR CLEANING THE EDGES OF WAFERS
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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10469109
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Filing Dt:
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02/16/2004
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Publication #:
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Pub Dt:
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12/15/2005
| | | | |
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Title:
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NOZZLE FOR INJECTING SUBLIMABLE SOLID PARTICLES ENTRAINED IN GAS FOR CLEANING A SURFACE
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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11133148
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Filing Dt:
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05/18/2005
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Publication #:
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Pub Dt:
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12/08/2005
| | | | |
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Title:
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CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS
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Patent #:
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Issue Dt:
|
03/21/2006
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Application #:
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11167470
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Filing Dt:
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06/27/2005
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Publication #:
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Pub Dt:
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10/27/2005
| | | | |
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Title:
|
SYSTEM FOR FORMING AEROSOLS AND COOLING DEVICE INCORPORATED THEREIN
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|
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Patent #:
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|
Issue Dt:
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03/09/2010
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Application #:
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11868930
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Filing Dt:
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10/08/2007
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Publication #:
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Pub Dt:
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04/09/2009
| | | | |
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Title:
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CLEANING DEVICE FOR CHEMICAL MECHANICAL POLISHING EQUIPMENT
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|
|
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Patent #:
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Issue Dt:
|
11/11/2014
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Application #:
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13095404
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Filing Dt:
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04/27/2011
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Publication #:
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Pub Dt:
|
11/03/2011
| | | | |
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Title:
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CHEMICAL MECHANICAL POLISHING SYSTEM
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|
|
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Patent #:
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Issue Dt:
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03/04/2014
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Application #:
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13099401
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Filing Dt:
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05/03/2011
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Publication #:
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Pub Dt:
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11/10/2011
| | | | |
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Title:
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CONDITIONER OF CHEMICAL MECHANICAL POLISHING APPARATUS
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Patent #:
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Issue Dt:
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01/27/2015
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Application #:
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13482043
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Filing Dt:
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05/29/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
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Title:
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MEMBRANE ASSEMBLY AND CARRIER HEAD HAVING THE MEMBRANE ASSEMBLY
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Patent #:
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Issue Dt:
|
07/11/2017
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Application #:
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14301669
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Filing Dt:
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06/11/2014
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Publication #:
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Pub Dt:
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12/18/2014
| | | | |
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Title:
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SUBSTRATE CLEANING APPARATUS AND METHOD AND BRUSH ASSEMBLY USED THEREIN
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|
|
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Patent #:
|
|
Issue Dt:
|
02/28/2017
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Application #:
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14623468
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Filing Dt:
|
02/16/2015
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Publication #:
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Pub Dt:
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01/21/2016
| | | | |
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Title:
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SLOT DIE COATING APPARATUS AND COATING METHOD USING THE SAME
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