Total properties:
32
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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09727530
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Filing Dt:
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11/28/2000
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Title:
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SYSTEM AND METHOD FOR REAL-TIME LIBRARY GENERATION OF GRATING PROFILES
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Patent #:
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Issue Dt:
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07/08/2003
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Application #:
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09727531
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Filing Dt:
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11/28/2000
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Title:
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CLUSTERING FOR DATA COMPRESSION
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09737705
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Filing Dt:
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12/14/2000
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Publication #:
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Pub Dt:
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12/12/2002
| | | | |
Title:
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SYSTEM AND METHOD FOR GRATING PROFILE CLASSIFICATION
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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09770997
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Filing Dt:
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01/25/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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CACHING OF INTRA-LAYER CALCULATIONS FOR RAPID RIGOROUS COUPLED-WAVE ANALYSES
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09772148
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Filing Dt:
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01/29/2001
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Publication #:
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Pub Dt:
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09/19/2002
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Title:
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METHOD AND APPARATUS FOR THE DETERMINATION OF MASK RULES USING SCATTEROMETRY
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Patent #:
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Issue Dt:
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03/02/2004
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Application #:
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09794686
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Filing Dt:
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02/27/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Title:
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GRATING TEST PATTERNS AND METHODS FOR OVERLAY METROLOGY
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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09907488
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Filing Dt:
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07/16/2001
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Publication #:
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Pub Dt:
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03/21/2002
| | | | |
Title:
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GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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09923578
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Filing Dt:
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08/06/2001
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Publication #:
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Pub Dt:
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02/06/2003
| | | | |
Title:
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METHOD AND SYSTEM OF DYNAMIC LEARNING THROUGH A REGRESSION-BASED LIBRARY GENERATION PROCESS
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Patent #:
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Issue Dt:
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12/21/2004
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Application #:
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10004495
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Filing Dt:
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10/23/2001
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Title:
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SYSTEM AND METHOD FOR EFFICIENT SIMULATION OF REFLECTOMETRY RESPONSE FROM TWO-DIMENSIONAL GRATING STRUCTURES
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Patent #:
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Issue Dt:
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08/19/2003
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Application #:
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10007124
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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06/05/2003
| | | | |
Title:
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OPTICAL PROFILOMETRY OF ADDITIONAL-MATERIAL DEVIATIONS IN A PERIODIC GRATING
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Patent #:
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Issue Dt:
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08/19/2003
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Application #:
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10022035
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Filing Dt:
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12/13/2001
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Publication #:
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Pub Dt:
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08/14/2003
| | | | |
Title:
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MEASUREMENT OF METAL ELECTROPLATING AND SEED LAYER THICKNESS AND PROFILE
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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10035925
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Filing Dt:
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10/22/2001
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Publication #:
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Pub Dt:
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10/16/2003
| | | | |
Title:
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BALANCING PLANARIZATION OF LAYERS AND THE EFFECT OF UNDERLYING STRUCTURE ON THE METROLOGY SIGNAL
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|
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Patent #:
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Issue Dt:
|
04/18/2006
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Application #:
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10051830
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Filing Dt:
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01/16/2002
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Publication #:
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Pub Dt:
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10/23/2003
| | | | |
Title:
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GENERATING A LIBRARY OF SIMULATED-DIFFRACTION SIGNALS AND HYPOTHETICAL PROFILES OF PERIODIC GRATINGS
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Patent #:
|
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Issue Dt:
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08/03/2004
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Application #:
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10066555
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Filing Dt:
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01/31/2002
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Publication #:
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Pub Dt:
|
11/13/2003
| | | | |
Title:
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OVERLAY MEASUREMENTS USING PERIODIC GRATINGS
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|
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Patent #:
|
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Issue Dt:
|
08/19/2003
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Application #:
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10075904
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Filing Dt:
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02/12/2002
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Title:
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PROFILE REFINEMENT FOR INTEGRATED CIRCUIT METROLOGY
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|
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Patent #:
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Issue Dt:
|
11/14/2006
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Application #:
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10087069
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Filing Dt:
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02/28/2002
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Publication #:
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Pub Dt:
|
08/28/2003
| | | | |
Title:
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GENERATION AND USE OF INTEGRATED CIRCUIT PROFILE-BASED SIMULATION INFORMATION
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|
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Patent #:
|
|
Issue Dt:
|
04/13/2004
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Application #:
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10108818
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Filing Dt:
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03/26/2002
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Publication #:
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Pub Dt:
|
10/02/2003
| | | | |
Title:
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METROLOGY HARDWARE SPECIFICATION USING A HARDWARE SIMULATOR
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|
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Patent #:
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|
Issue Dt:
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09/14/2004
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Application #:
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10109955
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Filing Dt:
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03/29/2002
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Publication #:
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Pub Dt:
|
10/02/2003
| | | | |
Title:
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METROLOGY DIFFRACTION SIGNAL ADAPTATION FOR TOOL-TO-TOOL MATCHING
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|
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Patent #:
|
|
Issue Dt:
|
11/11/2003
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Application #:
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10137200
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Filing Dt:
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04/30/2002
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Publication #:
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Pub Dt:
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10/30/2003
| | | | |
Title:
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COMBINED OPTICAL PROFILOMETRY AND PROJECTION MICROSCOPY OF INTEGRATED CIRCUIT STRUCTURES
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Patent #:
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Issue Dt:
|
10/12/2004
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Application #:
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10138903
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Filing Dt:
|
05/02/2002
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Publication #:
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Pub Dt:
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11/06/2003
| | | | |
Title:
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OVERLAY MEASUREMENTS USING ZERO-ORDER CROSS POLARIZATION MEASUREMENTS
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|
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Patent #:
|
|
Issue Dt:
|
05/08/2007
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Application #:
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10162516
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Filing Dt:
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06/03/2002
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Publication #:
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Pub Dt:
|
12/04/2003
| | | | |
Title:
|
SELECTION OF WAVELENGTHS FOR INTEGRATED CIRCUIT OPTICAL METROLOGY
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|
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Patent #:
|
|
Issue Dt:
|
08/10/2004
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Application #:
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10175207
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Filing Dt:
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06/18/2002
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Publication #:
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Pub Dt:
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12/18/2003
| | | | |
Title:
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OPTICAL METROLOGY OF SINGLE FEATURES
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|
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Patent #:
|
|
Issue Dt:
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08/24/2004
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Application #:
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10187258
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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01/01/2004
| | | | |
Title:
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SINGLE PASS LITHOGRAPHY OVERLAY TECHNIQUE
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|
|
Patent #:
|
|
Issue Dt:
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02/12/2008
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Application #:
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10206491
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Filing Dt:
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07/25/2002
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Publication #:
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|
Pub Dt:
|
01/29/2004
| | | | |
Title:
|
MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
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|
|
Patent #:
|
|
Issue Dt:
|
02/08/2005
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Application #:
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10213485
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Filing Dt:
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08/06/2002
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Publication #:
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|
Pub Dt:
|
10/02/2003
| | | | |
Title:
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METROLOGY HARDWARE ADAPTATION WITH UNIVERSAL LIBRARY
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|
|
Patent #:
|
|
Issue Dt:
|
01/11/2005
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Application #:
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10228692
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Filing Dt:
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08/26/2002
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Publication #:
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|
Pub Dt:
|
02/26/2004
| | | | |
Title:
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INTEGRATED CIRCUIT PROFILE VALUE DETERMINATION
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|
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Patent #:
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|
Issue Dt:
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08/15/2006
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Application #:
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10397631
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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01/29/2004
| | | | |
Title:
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OPTIMIZED MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
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|
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Patent #:
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|
Issue Dt:
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08/25/2009
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Application #:
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11595358
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Filing Dt:
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11/09/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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GENERATION AND USE OF INTEGRATED CIRCUIT PROFILE-BASED SIMULATION INFORMATION
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|
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Patent #:
|
|
Issue Dt:
|
01/06/2009
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Application #:
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11788735
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Filing Dt:
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04/20/2007
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Publication #:
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Pub Dt:
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08/23/2007
| | | | |
Title:
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SELECTION OF WAVELENGTHS FOR INTEGRATED CIRCUIT OPTICAL METROLOGY
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|
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Patent #:
|
|
Issue Dt:
|
09/22/2009
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Application #:
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11866408
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Filing Dt:
|
10/02/2007
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Publication #:
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Pub Dt:
|
10/09/2008
| | | | |
Title:
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GENERATION OF A LIBRARY OF PERIODIC GRATING DIFFRACTION SIGNALS
|
|
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Patent #:
|
|
Issue Dt:
|
03/17/2009
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Application #:
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12030166
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Filing Dt:
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02/12/2008
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Publication #:
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Pub Dt:
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06/26/2008
| | | | |
Title:
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MODEL AND PARAMETER SELECTION FOR OPTICAL METROLOGY
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|
|
Patent #:
|
|
Issue Dt:
|
09/08/2009
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Application #:
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12127640
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Filing Dt:
|
05/27/2008
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Publication #:
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|
Pub Dt:
|
10/23/2008
| | | | |
Title:
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OPTICAL METROLOGY OF SINGLE FEATURES
|
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