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Reel/Frame:032659/0256   Pages: 21
Recorded: 04/10/2014
Attorney Dkt #:EUV - BATCH 1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 26
1
Patent #:
6051841
Issue Dt:
04/18/2000
Application #:
09093416
Filing Dt:
06/08/1998
Title:
PLASMA FOCUS HIGH ENERGY PHOTON SOURCE
2
Patent #:
6064072
Issue Dt:
05/16/2000
Application #:
09268243
Filing Dt:
03/15/1999
Title:
PLASMA FOCUS HIGH ENERGY PHOTON SOURCE
3
Patent #:
6576912
Issue Dt:
06/10/2003
Application #:
09752818
Filing Dt:
01/03/2001
Publication #:
US20020084428
Pub Dt:
07/04/2002
Title:
A LITHOGRAPHIC PROJECTION APPARATUS EQUIPPED WITH EXTREME ULTRAVIOLET WINDOW SERVING SIMULTANEOUSLY AS VACUUM WINDOW
4
Patent #:
6566668
Issue Dt:
05/20/2003
Application #:
09875721
Filing Dt:
06/06/2001
Publication #:
US20020014599
Pub Dt:
02/07/2002
Title:
PLASMA FOCUS LIGHT SOURCE WITH TANDEM ELLIPSOIDAL MIRROR UNITS
5
Patent #:
6744060
Issue Dt:
06/01/2004
Application #:
10120655
Filing Dt:
04/10/2002
Publication #:
US20020163313
Pub Dt:
11/07/2002
Title:
PULSE POWER SYSTEM FOR EXTREME ULTRAVIOLET AND X-RAY SOURCES
6
Patent #:
6815700
Issue Dt:
11/09/2004
Application #:
10189824
Filing Dt:
07/03/2002
Publication #:
US20030006383
Pub Dt:
01/09/2003
Title:
PLASMA FOCUS LIGHT SOURCE WITH IMPROVED PULSE POWER SYSTEM
7
Patent #:
6972421
Issue Dt:
12/06/2005
Application #:
10409254
Filing Dt:
04/08/2003
Publication #:
US20040108473
Pub Dt:
06/10/2004
Title:
EXTREME ULTRAVIOLET LIGHT SOURCE
8
Patent #:
7180081
Issue Dt:
02/20/2007
Application #:
10742233
Filing Dt:
12/18/2003
Publication #:
US20040160155
Pub Dt:
08/19/2004
Title:
DISCHARGE PRODUCED PLASMA EUV LIGHT SOURCE
9
Patent #:
7217940
Issue Dt:
05/15/2007
Application #:
10798740
Filing Dt:
03/10/2004
Publication #:
US20060131515
Pub Dt:
06/22/2006
Title:
COLLECTOR FOR EUV LIGHT SOURCE
10
Patent #:
7087914
Issue Dt:
08/08/2006
Application #:
10803526
Filing Dt:
03/17/2004
Publication #:
US20050205810
Pub Dt:
09/22/2005
Title:
HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
11
Patent #:
7164144
Issue Dt:
01/16/2007
Application #:
10900839
Filing Dt:
07/27/2004
Publication #:
US20050199829
Pub Dt:
09/15/2005
Title:
EUV LIGHT SOURCE
12
Patent #:
7317196
Issue Dt:
01/08/2008
Application #:
10979919
Filing Dt:
11/01/2004
Publication #:
US20050205811
Pub Dt:
09/22/2005
Title:
LPP EUV LIGHT SOURCE
13
Patent #:
8075732
Issue Dt:
12/13/2011
Application #:
10979945
Filing Dt:
11/01/2004
Publication #:
US20060091109
Pub Dt:
05/04/2006
Title:
EUV COLLECTOR DEBRIS MANAGEMENT
14
Patent #:
7193228
Issue Dt:
03/20/2007
Application #:
11021261
Filing Dt:
12/22/2004
Publication #:
US20050199830
Pub Dt:
09/15/2005
Title:
EUV LIGHT SOURCE OPTICAL ELEMENTS
15
Patent #:
7405416
Issue Dt:
07/29/2008
Application #:
11067124
Filing Dt:
02/25/2005
Publication #:
US20060192154
Pub Dt:
08/31/2006
Title:
METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY
16
Patent #:
7402825
Issue Dt:
07/22/2008
Application #:
11168785
Filing Dt:
06/28/2005
Publication #:
US20060289806
Pub Dt:
12/28/2006
Title:
LPP EUV DRIVE LASER INPUT SYSTEM
17
Patent #:
7361918
Issue Dt:
04/22/2008
Application #:
11471258
Filing Dt:
06/20/2006
Publication #:
US20070029511
Pub Dt:
02/08/2007
Title:
HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
18
Patent #:
7525111
Issue Dt:
04/28/2009
Application #:
11471434
Filing Dt:
06/20/2006
Publication #:
US20080197297
Pub Dt:
08/21/2008
Title:
HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
19
Patent #:
7291853
Issue Dt:
11/06/2007
Application #:
11493945
Filing Dt:
07/26/2006
Publication #:
US20070023711
Pub Dt:
02/01/2007
Title:
DISCHARGE PRODUCED PLASMA EUV LIGHT SOURCE
20
Patent #:
7288777
Issue Dt:
10/30/2007
Application #:
11603471
Filing Dt:
11/21/2006
Publication #:
US20070114468
Pub Dt:
05/24/2007
Title:
COLLECTOR FOR EUV LIGHT SOURCE
21
Patent #:
7288778
Issue Dt:
10/30/2007
Application #:
11603670
Filing Dt:
11/21/2006
Publication #:
US20070114469
Pub Dt:
05/24/2007
Title:
COLLECTOR FOR EUV LIGHT SOURCE
22
Patent #:
7309871
Issue Dt:
12/18/2007
Application #:
11603732
Filing Dt:
11/21/2006
Publication #:
US20070114470
Pub Dt:
05/24/2007
Title:
COLLECTOR FOR EUV LIGHT SOURCE
23
Patent #:
7388220
Issue Dt:
06/17/2008
Application #:
11646938
Filing Dt:
12/27/2006
Publication #:
US20070125970
Pub Dt:
06/07/2007
Title:
EUV LIGHT SOURCE
24
Patent #:
7323703
Issue Dt:
01/29/2008
Application #:
11647007
Filing Dt:
12/27/2006
Publication #:
US20070158596
Pub Dt:
07/12/2007
Title:
EUV LIGHT SOURCE
25
Patent #:
7411203
Issue Dt:
08/12/2008
Application #:
11647016
Filing Dt:
12/27/2006
Publication #:
US20070158597
Pub Dt:
07/12/2007
Title:
EUV LIGHT SOURCE
26
Patent #:
7449704
Issue Dt:
11/11/2008
Application #:
11647024
Filing Dt:
12/27/2006
Publication #:
US20080017801
Pub Dt:
01/24/2008
Title:
EUV LIGHT SOURCE
Assignor
1
CYMER, LLC
Exec Dt:
01/06/2014
Assignee
1
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondence name and address
JEFFREY J. BROOKS
17075 THORNMINT COURT
SAN DIEGO, CA 92127

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