Patent Assignment Details
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| Reel/Frame: | 005520/0257 | |
| Pages: | 4 |
| | Recorded: | 11/19/1990 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07554222
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Filing Dt:
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07/16/1990
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Title:
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GAS-BASED BACKSIDE PROTECTION DURING SUBSTRATE PROCESSING
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Assignees
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| 2900 SEMICONDUCTOR DRIVE, |
| SANTA CLARA,, CALIFORNIA 95050 |
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| 3950 NORTH FIRST STREET, |
| SAN JOSE,, CALIFORNIA 95134 |
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Correspondence name and address
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SKJERVEN, MORRILL, MACPHERSON
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FRANKLIN & FRIEL
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25 METRO DR. STE. 700
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SAN JOSE, CA 95110
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05/28/2024 03:35 PM
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