Patent Assignment Details
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Reel/Frame: | 013620/0260 | |
| Pages: | 7 |
| | Recorded: | 12/26/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10251491
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Filing Dt:
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09/20/2002
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Publication #:
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Pub Dt:
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01/01/2004
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Title:
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Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
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Assignee
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34 SULLIVAN ROAD |
UNIT #21 |
BILLERICA, MASSACHUSETTS 01862 |
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Correspondence name and address
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KATTEN MUCHIN ZAVIS ROSENMAN
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JOHN S. PANIAGUAS
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525 WEST MONROE STREET
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SUITE 1600
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CHICAGO, IL 60661-3693
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