Patent Assignment Details
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Reel/Frame: | 026542/0260 | |
| Pages: | 3 |
| | Recorded: | 07/05/2011 | | |
Attorney Dkt #: | 3194.1068-001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/05/2015
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Application #:
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13699279
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Filing Dt:
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11/20/2012
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PCT #:
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US1137712
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Title:
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High Surface Resistivity Electrostatic Chuck
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Assignee
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821-4600 |
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Correspondence name and address
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ALICE O. CARROLL
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530 VIRGINIA ROAD, P.O. BOX 9133
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HAMILTON, BROOK, SMITH & REYNOLDS, P.C.
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CONCORD, MA 01742-9133
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