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Reel/Frame:057963/0266   Pages: 5
Recorded: 10/29/2021
Attorney Dkt #:LAMRP460US/9169-2US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
17594744
Filing Dt:
10/28/2021
Publication #:
Pub Dt:
07/07/2022
Title:
ATOMIC LAYER ETCH AND SELECTIVE DEPOSITION PROCESS FOR EXTREME ULTRAVIOLET LITHOGRAPHY RESIST IMPROVEMENT
Assignors
1
Exec Dt:
04/15/2020
2
Exec Dt:
04/15/2020
3
Exec Dt:
04/16/2020
4
Exec Dt:
04/15/2020
5
Exec Dt:
04/15/2020
6
Exec Dt:
04/28/2020
7
Exec Dt:
04/15/2020
8
Exec Dt:
04/15/2020
9
Exec Dt:
04/28/2020
10
Exec Dt:
04/18/2020
Assignee
1
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondence name and address
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O.BOX 70250
OAKLAND, CA 94612-0250

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