Total properties:
64
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Patent #:
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Issue Dt:
|
06/02/1998
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Application #:
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08687793
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Filing Dt:
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07/18/1996
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Title:
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LASER FOR GENERATING NARROW-BAND RADIATION
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Patent #:
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Issue Dt:
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12/21/1999
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Application #:
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08822451
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Filing Dt:
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03/21/1997
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Title:
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PRECISION VARIABLE DELAY USING SATURABLE INDUCTORS
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Patent #:
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Issue Dt:
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05/09/2000
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Application #:
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09073070
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Filing Dt:
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05/04/1998
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Title:
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LASER SYSTEM AND METHOD FOR NARROW SPECTRAL LINEWIDTH THROUGH WAVEFRONT CURVATURE COMPENSATION
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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09139214
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Filing Dt:
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08/24/1998
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Title:
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DIODE PUMPED LASER WITH FREQUENCY CONVERSION INTO UV AND DUV RANGE
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Patent #:
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Issue Dt:
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01/11/2000
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Application #:
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09162424
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Filing Dt:
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09/28/1998
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Title:
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STABILIZATION OF ANGULAR AND LATERAL LASER BEAM POSITION
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09244554
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Filing Dt:
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02/03/1999
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Title:
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WAVELENGTH SELECTOR FOR LASER WITH ADJUSTABLE ANGULAR DISPERSION
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Patent #:
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Issue Dt:
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12/05/2000
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Application #:
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09317526
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Filing Dt:
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05/24/1999
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Title:
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FZ (157NM) LASER EMPLOYING NEON AS THE BUFFER GAS
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Patent #:
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Issue Dt:
|
11/28/2000
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Application #:
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09317527
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Filing Dt:
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05/24/1999
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Title:
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MOLECULAR FLUORINE (F2) LASER WITH NARROW SPECTRAL LINEWIDTH
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Patent #:
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Issue Dt:
|
02/05/2002
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Application #:
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09317695
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Filing Dt:
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05/24/1999
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Title:
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F2-LASER WITH LINE SELECTION
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09379034
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Filing Dt:
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08/23/1999
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Title:
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PERFORMANCE CONTROL SYSTEM AND METHOD FOR GAS DISCHARGE LASERS
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09447882
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Filing Dt:
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11/23/1999
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Title:
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METHOD AND PROCEDURE TO AUTOMATICALLY STABILIZE EXCIMER LASER OUTPUT PARAMETERS
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09452353
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Filing Dt:
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12/01/1999
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Title:
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NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH
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Patent #:
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Issue Dt:
|
10/15/2002
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Application #:
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09453670
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Filing Dt:
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12/03/1999
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Title:
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DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09484818
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Filing Dt:
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01/18/2000
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Title:
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Very Stable Excimer Or Molecular Fluorine Laser
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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09512417
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Filing Dt:
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02/24/2000
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Title:
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ENERGY MONITOR FOR F2 MOLECULAR FLUORINE LASER AND METHOD OF ENERGY STABILIZATION
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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09513025
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Filing Dt:
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02/25/2000
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Title:
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ENERGY STABILIZED GAS DISCHARGE LASER
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09532276
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Filing Dt:
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03/21/2000
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Title:
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SURFACE PREIONIZATION FOR GAS LASERS
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09550558
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Filing Dt:
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04/17/2000
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Title:
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OPTICAL PULSE STRETCHING AND SMOOTHING FOR ARF AND F2 LITHOGRAPHY EXCIMER LASERS
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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09574921
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Filing Dt:
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05/19/2000
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Title:
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REDUCTION OF LASER SPECKLE IN PHOTOLITHOGRAPHY BY CONTROLLED DISRUPTION OF SPATIAL COHERENCE OF LASER BEAM
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09587996
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Filing Dt:
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06/06/2000
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Title:
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ROOF CONFIGURATION FOR LASER DISCHARGE ELECTRODES
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09602184
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Filing Dt:
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06/22/2000
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Title:
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NARROW BAND EXCIMER LASER WITH A PRISM-GRATING AS LINE-NARROWING OPTICAL ELEMENT
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09629256
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Filing Dt:
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07/31/2000
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Title:
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Excimer laser with line narrowing
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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09640595
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Filing Dt:
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08/17/2000
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Title:
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EXCIMER OR MOLECULAR LASER WITH OPTIMIZED SPECTRAL PURITY
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Patent #:
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Issue Dt:
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12/23/2003
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Application #:
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09686483
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Filing Dt:
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10/10/2000
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Title:
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TEMPERATURE COMPENSATION METHOD FOR WAVEMETERS
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09718805
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Filing Dt:
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11/22/2000
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Title:
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Performance control system and method for gas discharge lasers
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09733874
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Filing Dt:
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12/08/2000
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Publication #:
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Pub Dt:
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10/18/2001
| | | | |
Title:
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157 NM LASER SYSTEM AND METHOD FOR MULTI-LAYER SEMICONDUCTOR FAILURE ANALYSIS
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09734459
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Filing Dt:
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12/11/2000
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Publication #:
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Pub Dt:
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08/09/2001
| | | | |
Title:
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LASER GAS REPLENISHMENT METHOD
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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09771366
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Filing Dt:
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01/25/2001
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Publication #:
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Pub Dt:
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01/31/2002
| | | | |
Title:
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TUNABLE LASER WITH STABILIZED GRATING
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Patent #:
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Issue Dt:
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12/24/2002
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Application #:
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09775778
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Filing Dt:
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02/01/2001
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Publication #:
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Pub Dt:
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10/11/2001
| | | | |
Title:
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NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09776589
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Filing Dt:
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02/01/2001
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Publication #:
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Pub Dt:
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07/26/2001
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Title:
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NARROW BAND EXCIMER OR MOLECULAR FLUORINE LASER WITH ADJUSTABLE BANDWIDTH
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09791430
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Filing Dt:
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02/22/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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EXCIMER OR MOLECULAR FLUORINE LASER HAVING LENGTHENED ELECTRODES
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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09823298
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Filing Dt:
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03/29/2001
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Title:
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BLOWER FOR GAS LASER
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09826296
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Filing Dt:
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04/03/2001
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Publication #:
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Pub Dt:
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10/18/2001
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Title:
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DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09826372
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04/03/2001
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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DISCHARGE UNIT FOR A HIGH REPETITION RATE EXCIMER OR MOLECULAR FLUORINE LASER
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Patent #:
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12/21/2004
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09838715
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04/18/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Title:
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STABILIZATION TECHNIQUE FOR HIGH REPETITION RATE GAS DISCHARGE LASERS
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Patent #:
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03/01/2005
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09858147
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Filing Dt:
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05/14/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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ELECTRICAL EXCITATION CIRCUIT FOR A PULSED GAS LASER
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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09903425
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Filing Dt:
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07/10/2001
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Title:
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PRECISE MONITOR ETALON CALIBRATION TECHNIQUE
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Patent #:
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09/02/2003
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Application #:
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09920008
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07/31/2001
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Title:
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WAVELENGTH SELECTOR FOR LASER WITH ADJUSTABLE ANGULAR DISPERSION
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Patent #:
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08/19/2003
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09938329
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08/21/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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GAIN MODULE FOR DIODE-PUMPED SOLID STATE LASER AND AMPLIFIER
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Patent #:
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Issue Dt:
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10/05/2004
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09960875
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09/21/2001
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05/16/2002
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Title:
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LASER SYSTEM AND METHOD FOR SPECTRAL NARROWING THROUGH WAVEFRONT CORRECTION
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03/15/2005
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10001954
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10/31/2001
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Title:
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RESONATOR OPTICS FOR HIGH POWER UV LASERS
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02/15/2005
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10035351
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10/19/2001
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10/03/2002
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RESONATOR ARRANGEMENT FOR BANDWIDTH CONTROL
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09/14/2004
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10112660
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03/28/2002
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Title:
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METHOD AND APPARATUS FOR REDUCTION OF SPECTRAL FLUCTUATIONS
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01/07/2003
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10114184
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04/01/2002
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Pub Dt:
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08/01/2002
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Title:
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LASER GAS REPLENISHMENT METHOD
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12/03/2002
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10114620
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04/01/2002
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Pub Dt:
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08/01/2002
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Title:
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LASER GAS REPLENISHMENT METHOD
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Patent #:
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12/10/2002
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Application #:
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10121292
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04/12/2002
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Pub Dt:
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08/15/2002
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Title:
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LASER GAS REPLENISHMENT METHOD
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12/21/2004
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10162115
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06/03/2002
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Title:
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MOLECULAR FLUORINE LASER WITH INTRACAVITY POLARIZATION ENHANCER
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07/27/2004
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10163098
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06/04/2002
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Title:
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HIGH POWER EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM
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11/23/2004
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10165767
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06/06/2002
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Title:
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METHOD AND APPARATUS FOR COMPENSATION OF BEAM PROPERTY DRIFTS DETECTED BY MEASUREMENT SYSTEMS OUTSIDE OF AN EXCIMER LASER
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01/04/2005
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10236036
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09/04/2002
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Title:
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ON-LINE QUALITY CONTROL OF THE KEY OPTICAL COMPONENTS IN LITHOGRAPHY LASERS USING LASER INDUCED FLUORESCENCE
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11/15/2005
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10338779
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01/06/2003
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12/16/2004
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Title:
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LASER GAS REPLENISHMENT METHOD
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02/28/2006
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10354945
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01/29/2003
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11/13/2003
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ABSOLUTE WAVELENGTH CALIBRATION OF LITHOGRAPHY LASER USING MULTIPLE ELEMENT OR TANDEM SEE THROUGH HOLLOW CATHODE LAMP
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11/29/2005
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10438240
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05/14/2003
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11/27/2003
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DUV AND VUV LASER WITH ON-LINE PULSE ENERGY MONITOR
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01/31/2006
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05/20/2003
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01/08/2004
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SYSTEM AND METHOD FOR DELAY COMPENSATION FOR A PULSED LASER
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12/11/2007
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11/03/2003
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02/10/2005
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EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH PRECISION TIMING
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02/14/2006
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10713583
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11/14/2003
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08/04/2005
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REDUCED-MAINTENANCE EXCIMER LASER WITH OIL-FREE SOLID STATE PULSER
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07/18/2006
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10727718
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12/04/2003
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07/08/2004
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SYSTEMS AND METHODS UTILIZING LASER DISCHARGE ELECTRODES WITH CERAMIC SPOILERS
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01/17/2006
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10776137
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02/11/2004
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10/14/2004
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EXCIMER OR MOLECULAR FLUORINE LASER WITH SEVERAL DISCHARGE CHAMBERS
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01/02/2007
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02/11/2004
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09/16/2004
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MASTER OSCILLATOR/POWER AMPLIFIER EXCIMER LASER SYSTEM WITH PULSE ENERGY AND POINTING CONTROL
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01/16/2007
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02/12/2004
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10/14/2004
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TEMPERATURE CONTROL SYSTEMS FOR EXCIMER LASERS
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04/29/2008
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05/17/2004
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12/02/2004
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MOPA EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH IMPROVED SYNCHRONIZATION
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02/27/2007
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06/30/2004
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01/06/2005
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MASTER-OSCILLATOR POWER-AMPLIFIER (MOPA) EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH LONG OPTICS LIFETIME
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09/04/2007
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11263626
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10/31/2005
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03/16/2006
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Title:
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LASER GAS REPLENISHMENT METHOD
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07/17/2007
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01/18/2007
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05/24/2007
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Title:
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MASTER-OSCILLATOR POWER-AMPLIFIER (MOPA) EXCIMER OR MOLECULAR FLUORINE LASER SYSTEM WITH LONG OPTICS LIFETIME
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