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Patent Assignment Details
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Reel/Frame:009844/0272   Pages: 2
Recorded: 03/19/1999
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
10/23/2001
Application #:
09273293
Filing Dt:
03/19/1999
Publication #:
Pub Dt:
11/15/2001
Title:
METHOD AND APPARATUS FOR PLASMA ETCHING
Assignors
1
Exec Dt:
03/19/1999
2
Exec Dt:
03/19/1999
3
Exec Dt:
03/19/1999
Assignee
1
7-1, SHIBA 5-CHOME
MINATO-KU, TOKYO, JAPAN
Correspondence name and address
FOLEY, HOAG & ELIOT LLP
DANALD W. MUIRHEAD
ONE POST OFFICE SQUARE
BOSTON, MA 02109-2170

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