Patent Assignment Details
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Reel/Frame: | 009844/0272 | |
| Pages: | 2 |
| | Recorded: | 03/19/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09273293
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Filing Dt:
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03/19/1999
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Publication #:
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Pub Dt:
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11/15/2001
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Title:
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METHOD AND APPARATUS FOR PLASMA ETCHING
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Assignee
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7-1, SHIBA 5-CHOME |
MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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FOLEY, HOAG & ELIOT LLP
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DANALD W. MUIRHEAD
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ONE POST OFFICE SQUARE
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BOSTON, MA 02109-2170
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