Patent Assignment Details
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| Reel/Frame: | 039798/0273 | |
| Pages: | 3 |
| | Recorded: | 09/20/2016 | | |
| Attorney Dkt #: | 31198 169D |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/24/2017
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Application #:
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14571533
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Filing Dt:
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12/16/2014
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Publication #:
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Pub Dt:
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10/15/2015
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Title:
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METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
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Assignee
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| 20 FORTUNE DRIVE |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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JERRY COHEN
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125 SUMMER STREET
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BURNS & LEVINSON LLP
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BOSTON, MA 02110
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