Patent Assignment Details
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Reel/Frame: | 010054/0274 | |
| Pages: | 3 |
| | Recorded: | 06/30/1999 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09287611
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Filing Dt:
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04/07/1999
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Title:
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METHOD FOR DETECTING END POINT OF PLASMA ETCHING, AND PLASMA ETCHING APPARATUS
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Assignee
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4-1, NISHI-SHINJUKU 2-CHOME |
SHINJUKU-KU, TOKYO, JAPAN |
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Correspondence name and address
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KONRAD RAYNES & VICTOR LLP
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ALAN RAYNES
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1180 SOUTH BEVERLY DRIVE, SUITE 501
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LOS ANGELES, CA 90035
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