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Reel/Frame:013740/0279   Pages: 6
Recorded: 02/13/2003
Conveyance: CORRECTIVE MISSING ASSIGNEE
Total properties: 1
1
Patent #:
Issue Dt:
10/30/2001
Application #:
09171786
Filing Dt:
05/07/1999
Title:
SUBSTRATE TEMPERATURE MEASURING APPARATUS, SUBSTRATE TEMPERATURE MEASURING METHOD, SUBSTRATE HEATING METHOD AND HEAT TREATMENT APPARATUS
Assignors
1
Exec Dt:
02/13/2003
2
Exec Dt:
02/13/2003
Assignees
1
7-25 KITASHINIAGAWA 6-CHOME
TOKYO, JAPAN
2
BENZSTRASSE 1
D-85551 KIRCHHEIM, GERMANY
Correspondence name and address
RADER, FISHMAN & GRAUER
RONALD P. KANANEN
SUITE #501
1233 20TH STREET, N.W.
WASHINGTON, DC 20036

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