Patent Assignment Details
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| Reel/Frame: | 017131/0279 | |
| Pages: | 6 |
| | Recorded: | 10/24/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/14/2009
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Application #:
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11207996
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Filing Dt:
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08/22/2005
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Publication #:
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Pub Dt:
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02/22/2007
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Title:
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METHOD FOR THE REMOVAL OF DEPOSITION ON AN OPTICAL ELEMENT, METHOD FOR THE PROTECTION OF AN OPTICAL ELEMENT, DEVICE MANUFACTURING METHOD, APPARATUS INCLUDING AN OPTICAL ELEMENT, AND LITHOGRAPHIC APPARATUS
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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Correspondence name and address
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PILLSBURY WINTHROP SHAW PITTMAN LLP
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P.O. BOX 10500
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1650 TYSONS BOULEVARD
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MCLEAN, VIRGINIA 22102
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