Total properties:
13
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09401754
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Filing Dt:
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09/23/1999
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Title:
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MULTI-LAYER SPUTTER DEPOSITION APPARATUS
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Patent #:
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|
Issue Dt:
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04/17/2001
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Application #:
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09404516
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Filing Dt:
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09/23/1999
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Title:
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IN-LINE SPUTTER DEPOSITION SYSTEM
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Patent #:
|
|
Issue Dt:
|
05/22/2001
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Application #:
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09433859
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Filing Dt:
|
11/04/1999
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Title:
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DISK FURNACE FOR THERMAL PROCESSING
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Patent #:
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Issue Dt:
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05/28/2002
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Application #:
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09469382
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Filing Dt:
|
12/22/1999
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Title:
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PERMANENT MAGNET ECR PLASMA SOURCE WITH INTEGRATED MULTIPOLAR MAGNETIC CONFINEMENT
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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09916643
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
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03/21/2002
| | | | |
Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Patent #:
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Issue Dt:
|
03/11/2003
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Application #:
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09917223
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
|
03/21/2002
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Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Patent #:
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Issue Dt:
|
11/23/2004
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Application #:
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09917224
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
|
03/21/2002
| | | | |
Title:
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SUBSTRATE PROCESSING PALLET AND RELATED SUBSTRATE PROCESSING METHOD AND MACHINE
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Patent #:
|
|
Issue Dt:
|
09/05/2006
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Application #:
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10618091
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Filing Dt:
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07/11/2003
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Publication #:
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Pub Dt:
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05/26/2005
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Title:
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ULTRA-THIN WAFER HANDLING SYSTEM
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Patent #:
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Issue Dt:
|
11/04/2008
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Application #:
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10971530
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Filing Dt:
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10/22/2004
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Publication #:
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Pub Dt:
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07/28/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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|
Patent #:
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NONE
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Issue Dt:
|
|
Application #:
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10971726
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Filing Dt:
|
10/22/2004
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Publication #:
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Pub Dt:
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08/04/2005
| | | | |
Title:
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Method and apparatus for fluid processing a workpiece
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Patent #:
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|
Issue Dt:
|
05/25/2010
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Application #:
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10971729
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Filing Dt:
|
10/22/2004
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Publication #:
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Pub Dt:
|
04/28/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
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11155008
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Filing Dt:
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06/16/2005
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Publication #:
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Pub Dt:
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12/29/2005
| | | | |
Title:
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Method and apparatus for fluid processing and drying a workpiece
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Patent #:
|
|
Issue Dt:
|
06/01/2010
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Application #:
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11265543
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Filing Dt:
|
11/02/2005
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Publication #:
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|
Pub Dt:
|
05/25/2006
| | | | |
Title:
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BALANCING PRESSURE TO IMPROVE A FLUID SEAL
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|