Total properties:
23
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10676224
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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OPTICAL MOUNTINGS FOR GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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10712545
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Filing Dt:
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11/13/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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LONG DELAY AND HIGH TIS PULSE STRETCHER
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Patent #:
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Issue Dt:
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02/20/2007
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Application #:
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10742233
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Filing Dt:
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12/18/2003
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Publication #:
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Pub Dt:
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08/19/2004
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Title:
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DISCHARGE PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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12/04/2007
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Application #:
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10789328
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Filing Dt:
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02/27/2004
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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METHOD AND APPARATUS FOR BANDWIDTH MEASUREMENT AND BANDWIDTH PARAMETER CALCULATION FOR LASER LIGHT
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10803526
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Filing Dt:
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03/17/2004
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10815386
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Filing Dt:
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03/31/2004
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Publication #:
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Pub Dt:
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10/13/2005
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Title:
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VERY HIGH REPETITION RATE NARROW BAND GAS DISCHARGE LASER SYSTEM
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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10815387
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Filing Dt:
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03/31/2004
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Publication #:
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Pub Dt:
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10/13/2005
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Title:
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GAS DISCHARGE LASER CHAMBER IMPROVEMENTS
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Patent #:
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Issue Dt:
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05/06/2008
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Application #:
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10847799
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Filing Dt:
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05/18/2004
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Publication #:
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Pub Dt:
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05/19/2005
| | | | |
Title:
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LASER OUTPUT LIGHT PULSE STRETCHER
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10875662
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Filing Dt:
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06/23/2004
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Publication #:
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Pub Dt:
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12/29/2005
| | | | |
Title:
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LASER OUTPUT BEAM WAVEFRONT SPLITTER FOR BANDWIDTH SPECTRUM CONTROL
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Patent #:
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Issue Dt:
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11/27/2007
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Application #:
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10877737
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Filing Dt:
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06/25/2004
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Publication #:
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Pub Dt:
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03/03/2005
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Title:
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HALOGEN GAS DISCHARGE LASER ELECTRODES
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Patent #:
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Issue Dt:
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01/16/2007
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Application #:
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10900839
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Filing Dt:
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07/27/2004
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Publication #:
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Pub Dt:
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09/15/2005
| | | | |
Title:
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EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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11021261
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Filing Dt:
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12/22/2004
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Publication #:
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Pub Dt:
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09/15/2005
| | | | |
Title:
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EUV LIGHT SOURCE OPTICAL ELEMENTS
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|
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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11067124
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Filing Dt:
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02/25/2005
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Publication #:
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Pub Dt:
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08/31/2006
| | | | |
Title:
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METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY
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Patent #:
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Issue Dt:
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04/22/2008
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Application #:
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11471258
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Filing Dt:
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06/20/2006
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Publication #:
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Pub Dt:
|
02/08/2007
| | | | |
Title:
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HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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04/28/2009
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Application #:
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11471434
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Filing Dt:
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06/20/2006
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Publication #:
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Pub Dt:
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08/21/2008
| | | | |
Title:
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HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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11/06/2007
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Application #:
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11493945
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Filing Dt:
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07/26/2006
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Publication #:
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Pub Dt:
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02/01/2007
| | | | |
Title:
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DISCHARGE PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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|
Issue Dt:
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10/30/2007
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Application #:
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11603471
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Filing Dt:
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11/21/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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COLLECTOR FOR EUV LIGHT SOURCE
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Patent #:
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|
Issue Dt:
|
10/30/2007
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Application #:
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11603670
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Filing Dt:
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11/21/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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COLLECTOR FOR EUV LIGHT SOURCE
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Patent #:
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|
Issue Dt:
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12/18/2007
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Application #:
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11603732
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Filing Dt:
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11/21/2006
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Publication #:
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Pub Dt:
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05/24/2007
| | | | |
Title:
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COLLECTOR FOR EUV LIGHT SOURCE
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Patent #:
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|
Issue Dt:
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06/17/2008
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Application #:
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11646938
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Filing Dt:
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12/27/2006
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Publication #:
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Pub Dt:
|
06/07/2007
| | | | |
Title:
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EUV LIGHT SOURCE
|
|
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Patent #:
|
|
Issue Dt:
|
01/29/2008
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Application #:
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11647007
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Filing Dt:
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12/27/2006
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Publication #:
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Pub Dt:
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07/12/2007
| | | | |
Title:
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EUV LIGHT SOURCE
|
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Patent #:
|
|
Issue Dt:
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08/12/2008
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Application #:
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11647016
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Filing Dt:
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12/27/2006
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Publication #:
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Pub Dt:
|
07/12/2007
| | | | |
Title:
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EUV LIGHT SOURCE
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|
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Patent #:
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|
Issue Dt:
|
11/11/2008
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Application #:
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11647024
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Filing Dt:
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12/27/2006
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Publication #:
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Pub Dt:
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01/24/2008
| | | | |
Title:
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EUV LIGHT SOURCE
|
|