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Reel/Frame:	056465/0280			Pages:	23
		Recorded:	03/04/2021
Attorney Dkt #:	ASMEX.001GEN
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 207
Page 1 of 3
Pages: 1 2 3

Patent #:	6394440	Issue Dt:	05/28/2002	Application #:	09624127	Filing Dt:	07/24/2000
Title:	DUAL ORIENTATION LEVELING PLATFORM FOR SEMICONDUCTOR APPARATUS

Patent #:	7018504	Issue Dt:	03/28/2006	Application #:	09658784	Filing Dt:	09/11/2000
Title:	LOADLOCK WITH INTEGRATED PRE-CLEAN CHAMBER

Patent #:	6585478	Issue Dt:	07/01/2003	Application #:	09709782	Filing Dt:	11/07/2000
Title:	SEMICONDUCTOR HANDLING ROBOT WITH IMPROVED PADDLE-TYPE END EFFECTOR

Patent #:	6634882	Issue Dt:	10/21/2003	Application #:	09747173	Filing Dt:	12/22/2000
Publication #:	US20030049580	Pub Dt:	03/13/2003
Title:	SUSCEPTOR POCKET PROFILE TO IMPROVE PROCESS PERFORMANCE

Patent #:	6609869	Issue Dt:	08/26/2003	Application #:	09754571	Filing Dt:	01/04/2001
Publication #:	US20020085899	Pub Dt:	07/04/2002
Title:	TRANSFER CHAMBER WITH INTEGRAL LOADLOCK AND STAGING STATION

Patent #:	6620743	Issue Dt:	09/16/2003	Application #:	09817770	Filing Dt:	03/26/2001
Publication #:	US20030005944	Pub Dt:	01/09/2003
Title:	STABLE, OXIDE-FREE SILICON SURFACE PREPARATION

Patent #:	7166165	Issue Dt:	01/23/2007	Application #:	09828550	Filing Dt:	04/06/2001
Publication #:	US20020011211	Pub Dt:	01/31/2002
Title:	BARRIER COATING FOR VITREOUS MATERIALS

Patent #:	6521503	Issue Dt:	02/18/2003	Application #:	09840532	Filing Dt:	04/23/2001
Publication #:	US20020155669	Pub Dt:	10/24/2002
Title:	HIGH TEMPERATURE DROP-OFF OF A SUBSTRATE

Patent #:	7008802	Issue Dt:	03/07/2006	Application #:	09870393	Filing Dt:	05/29/2001
Publication #:	US20040151574	Pub Dt:	08/05/2004
Title:	METHOD AND APPARATUS TO CORRECT WAFER DRIFT

Patent #:	6592318	Issue Dt:	07/15/2003	Application #:	09905578	Filing Dt:	07/13/2001
Publication #:	US20030012626	Pub Dt:	01/16/2003
Title:	DOCKING CART WITH INTEGRATED LOAD PORT

Patent #:	6465761	Issue Dt:	10/15/2002	Application #:	09911212	Filing Dt:	07/23/2001
Publication #:	US20020007797	Pub Dt:	01/24/2002
Title:	HEAT LAMPS FOR ZONE HEATING

Patent #:	6613695	Issue Dt:	09/02/2003	Application #:	09944734	Filing Dt:	08/31/2001
Publication #:	US20020098627	Pub Dt:	07/25/2002
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION

Patent #:	6716751	Issue Dt:	04/06/2004	Application #:	10074149	Filing Dt:	02/11/2002
Publication #:	US20020173113	Pub Dt:	11/21/2002
Title:	DOPANT PRECURSORS AND PROCESSES

Patent #:	6958253	Issue Dt:	10/25/2005	Application #:	10074534	Filing Dt:	02/11/2002
Publication #:	US20030022528	Pub Dt:	01/30/2003
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	6821825	Issue Dt:	11/23/2004	Application #:	10074563	Filing Dt:	02/11/2002
Publication #:	US20030082300	Pub Dt:	05/01/2003
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	6962859	Issue Dt:	11/08/2005	Application #:	10074564	Filing Dt:	02/11/2002
Publication #:	US20020197831	Pub Dt:	12/26/2002
Title:	THIN FILMS AND METHOD OF MAKINLG THEM

Patent #:	6900115	Issue Dt:	05/31/2005	Application #:	10074633	Filing Dt:	02/11/2002
Publication #:	US20020168868	Pub Dt:	11/14/2002
Title:	DEPOSITION OVER MIXED SUBSTRATES

Patent #:	7026219	Issue Dt:	04/11/2006	Application #:	10074722	Filing Dt:	02/11/2002
Publication #:	US20020173130	Pub Dt:	11/21/2002
Title:	INTEGRATION OF HIGH K GATE DIELECTRIC

Patent #:	6596973	Issue Dt:	07/22/2003	Application #:	10096138	Filing Dt:	03/07/2002
Title:	PYROMETER CALIBRATED WAFER TEMPERATURE ESTIMATOR

Patent #:	6776849	Issue Dt:	08/17/2004	Application #:	10100308	Filing Dt:	03/15/2002
Publication #:	US20030173031	Pub Dt:	09/18/2003
Title:	WAFER HOLDER WITH PERIPHERAL LIFT RING

Patent #:	6861321	Issue Dt:	03/01/2005	Application #:	10118073	Filing Dt:	04/05/2002
Publication #:	US20030190823	Pub Dt:	10/09/2003
Title:	METHOD OF LOADING A WAFER ONTO A WAFER HOLDER TO REDUCE THERMAL SHOCK

Patent #:	7070660	Issue Dt:	07/04/2006	Application #:	10139098	Filing Dt:	05/03/2002
Publication #:	US20030205324	Pub Dt:	11/06/2003
Title:	WAFER HOLDER WITH STIFFENING RIB

Patent #:	6976586	Issue Dt:	12/20/2005	Application #:	10144158	Filing Dt:	05/10/2002
Publication #:	US20030209463	Pub Dt:	11/13/2003
Title:	DELICATE PRODUCT PACKAGING SYSTEM

Patent #:	6825051	Issue Dt:	11/30/2004	Application #:	10150989	Filing Dt:	05/17/2002
Publication #:	US20030215963	Pub Dt:	11/20/2003
Title:	PLASMA ETCH RESISTANT COATING AND PROCESS

Patent #:	7108748	Issue Dt:	09/19/2006	Application #:	10158393	Filing Dt:	05/29/2002
Publication #:	US20030036268	Pub Dt:	02/20/2003
Title:	LOW TEMPERATURE LOAD AND BAKE

Patent #:	6900877	Issue Dt:	05/31/2005	Application #:	10170307	Filing Dt:	06/12/2002
Publication #:	US20030231950	Pub Dt:	12/18/2003
Title:	SEMICONDUCTOR WAFER POSITION SHIFT MEASUREMENT AND CORRECTION

Patent #:	6856078	Issue Dt:	02/15/2005	Application #:	10179658	Filing Dt:	06/24/2002
Publication #:	US20030001475	Pub Dt:	01/02/2003
Title:	LAMP FILAMENT DESIGN

Patent #:	6858196	Issue Dt:	02/22/2005	Application #:	10197899	Filing Dt:	07/16/2002
Publication #:	US20030017092	Pub Dt:	01/23/2003
Title:	METHOD AND APPARATUS FOR CHEMICAL SYNTHESIS

Patent #:	6818864	Issue Dt:	11/16/2004	Application #:	10217230	Filing Dt:	08/09/2002
Publication #:	US20040026400	Pub Dt:	02/12/2004
Title:	LED HEAT LAMP ARRAYS FOR CVD HEATING

Patent #:	7186630	Issue Dt:	03/06/2007	Application #:	10219687	Filing Dt:	08/14/2002
Publication #:	US20040033674	Pub Dt:	02/19/2004
Title:	DEPOSITION OF AMORPHOUS SILICON-CONTAINING FILMS

Patent #:	6929299	Issue Dt:	08/16/2005	Application #:	10225545	Filing Dt:	08/20/2002
Publication #:	US20050088003	Pub Dt:	04/28/2005
Title:	BONDED STRUCTURES FOR USE IN SEMICONDUCTOR PROCESSING ENVIRONMENTS

Patent #:	6883776	Issue Dt:	04/26/2005	Application #:	10225546	Filing Dt:	08/20/2002
Publication #:	US20040036053	Pub Dt:	02/26/2004
Title:	SLIT VALVE FOR A SEMICONDUCTOR PROCESSING SYSTEM

Patent #:	6960537	Issue Dt:	11/01/2005	Application #:	10260370	Filing Dt:	09/26/2002
Publication #:	US20030072975	Pub Dt:	04/17/2003
Title:	INCORPORATION OF NITROGEN INTO HIGH K DIELECTRIC FILM

Patent #:	6696367	Issue Dt:	02/24/2004	Application #:	10260821	Filing Dt:	09/27/2002
Title:	SYSTEM FOR THE IMPROVED HANDLING OF WAFERS WITHIN A PROCESS TOOL

Patent #:	6879777	Issue Dt:	04/12/2005	Application #:	10265519	Filing Dt:	10/03/2002
Publication #:	US20040067052	Pub Dt:	04/08/2004
Title:	LOCALIZED HEATING OF SUBSTRATES USING OPTICS

Patent #:	6704496	Issue Dt:	03/09/2004	Application #:	10291897	Filing Dt:	11/08/2002
Publication #:	US20030070758	Pub Dt:	04/17/2003
Title:	HIGH TEMPERATURE DROP-OFF OF A SUBSTRATE

Patent #:	6743738	Issue Dt:	06/01/2004	Application #:	10294233	Filing Dt:	11/13/2002
Publication #:	US20030068869	Pub Dt:	04/10/2003
Title:	DOPANT PRECURSORS AND PROCESSES

Patent #:	6716713	Issue Dt:	04/06/2004	Application #:	10294235	Filing Dt:	11/13/2002
Publication #:	US20030068851	Pub Dt:	04/10/2003
Title:	DOPANT PRECURSORS AND ION IMPLANTATION PROCESSES

Patent #:	6720531	Issue Dt:	04/13/2004	Application #:	10317267	Filing Dt:	12/11/2002
Title:	LIGHT SCATTERING PROCESS CHAMBER WALLS

Patent #:	7033445	Issue Dt:	04/25/2006	Application #:	10327296	Filing Dt:	12/20/2002
Publication #:	US20030140850	Pub Dt:	07/31/2003
Title:	GRIDDED SUSCEPTOR

Patent #:	6781291	Issue Dt:	08/24/2004	Application #:	10329811	Filing Dt:	12/23/2002
Publication #:	US20030102792	Pub Dt:	06/05/2003
Title:	LAMP DESIGN

Patent #:	6709267	Issue Dt:	03/23/2004	Application #:	10331444	Filing Dt:	12/27/2002
Title:	SUBSTRATE HOLDER WITH DEEP ANNULAR GROOVE TO PREVENT EDGE HEAT LOSS

Patent #:	6950774	Issue Dt:	09/27/2005	Application #:	10347779	Filing Dt:	01/16/2003
Publication #:	US20040143412	Pub Dt:	07/22/2004
Title:	OUT-OF-POCKET DETECTION SYSTEM USING WAFER ROTATION AS AN INDICATOR

Patent #:	6899145	Issue Dt:	05/31/2005	Application #:	10393717	Filing Dt:	03/20/2003
Publication #:	US20040182472	Pub Dt:	09/23/2004
Title:	FRONT OPENING UNIFIED POD

Patent #:	7005160	Issue Dt:	02/28/2006	Application #:	10424207	Filing Dt:	04/24/2003
Publication #:	US20040213907	Pub Dt:	10/28/2004
Title:	METHODS FOR DEPOSITING POLYCRYSTALLINE FILMS WITH ENGINEERED GRAIN STRUCTURES

Patent #:	7452757	Issue Dt:	11/18/2008	Application #:	10434423	Filing Dt:	05/07/2003
Publication #:	US20040097022	Pub Dt:	05/20/2004
Title:	SILICON-ON-INSULATOR STRUCTURES AND METHODS

Patent #:	7168911	Issue Dt:	01/30/2007	Application #:	10437207	Filing Dt:	05/13/2003
Title:	SEMICONDUCTOR HANDLING ROBOT WITH IMPROVED PADDLE-TYPE END EFFECTOR

Patent #:	7235806	Issue Dt:	06/26/2007	Application #:	10439393	Filing Dt:	05/16/2003
Publication #:	US20040227111	Pub Dt:	11/18/2004
Title:	WAFER EDGE WITH LIGHT SENSOR

Patent #:	6823753	Issue Dt:	11/30/2004	Application #:	10439521	Filing Dt:	05/16/2003
Publication #:	US20040226390	Pub Dt:	11/18/2004
Title:	SENSOR SIGNAL TRANSMISSION FROM PROCESSING SYSTEM

Patent #:	6797617	Issue Dt:	09/28/2004	Application #:	10441642	Filing Dt:	05/20/2003
Publication #:	US20030219977	Pub Dt:	11/27/2003
Title:	REDUCED CROSS-CONTAMINATION BETWEEN CHAMBERS IN A SEMICONDUCTOR PROCESSING TOOL

Patent #:	6729875	Issue Dt:	05/04/2004	Application #:	10455267	Filing Dt:	06/04/2003
Publication #:	US20030198910	Pub Dt:	10/23/2003
Title:	SUSCEPTOR POCKET PROFILE TO IMPROVE PROCESS PERFORMANCE

Patent #:	6924463	Issue Dt:	08/02/2005	Application #:	10459835	Filing Dt:	06/11/2003
Publication #:	US20030210901	Pub Dt:	11/13/2003
Title:	PYROMETER CALIBRATED WAFER TEMPERATURE ESTIMATOR

Patent #:	7077388	Issue Dt:	07/18/2006	Application #:	10622127	Filing Dt:	07/17/2003
Publication #:	US20040084149	Pub Dt:	05/06/2004
Title:	BUBBLER FOR SUBSTRATE PROCESSING

Patent #:	7297641	Issue Dt:	11/20/2007	Application #:	10623482	Filing Dt:	07/18/2003
Publication #:	US20050118837	Pub Dt:	06/02/2005
Title:	METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS

Patent #:	7056835	Issue Dt:	06/06/2006	Application #:	10626212	Filing Dt:	07/24/2003
Publication #:	US20040121620	Pub Dt:	06/24/2004
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION

Patent #:	6958277	Issue Dt:	10/25/2005	Application #:	10626217	Filing Dt:	07/24/2003
Publication #:	US20040147101	Pub Dt:	07/29/2004
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION

Patent #:	7122085	Issue Dt:	10/17/2006	Application #:	10629029	Filing Dt:	07/29/2003
Publication #:	US20050072357	Pub Dt:	04/07/2005
Title:	SUBLIMATION BED EMPLOYING CARRIER GAS GUIDANCE STRUCTURES

Patent #:	7231141	Issue Dt:	06/12/2007	Application #:	10654068	Filing Dt:	09/03/2003
Publication #:	US20040043575	Pub Dt:	03/04/2004
Title:	HIGH TEMPERATURE DROP-OFF OF A SUBSTRATE

Patent #:	7108753	Issue Dt:	09/19/2006	Application #:	10696481	Filing Dt:	10/29/2003
Publication #:	US20050092242	Pub Dt:	05/05/2005
Title:	STAGGERED RIBS ON PROCESS CHAMBER TO REDUCE THERMAL EFFECTS

Patent #:	6883250	Issue Dt:	04/26/2005	Application #:	10701681	Filing Dt:	11/04/2003
Publication #:	US20050091992	Pub Dt:	05/05/2005
Title:	NON-CONTACT COOL-DOWN STATION FOR WAFERS

Patent #:	7169233	Issue Dt:	01/30/2007	Application #:	10719416	Filing Dt:	11/21/2003
Publication #:	US20050109275	Pub Dt:	05/26/2005
Title:	REACTOR CHAMBER

Patent #:	6840767	Issue Dt:	01/11/2005	Application #:	10744848	Filing Dt:	12/22/2003
Publication #:	US20040137398	Pub Dt:	07/15/2004
Title:	SUSCEPTOR POCKET PROFILE TO IMPROVE PROCESS PERFORMANCE

Patent #:	6998305	Issue Dt:	02/14/2006	Application #:	10763948	Filing Dt:	01/23/2004
Publication #:	US20040171238	Pub Dt:	09/02/2004
Title:	ENHANCED SELECTIVITY FOR EPITAXIAL DEPOSITION

Patent #:	7169234	Issue Dt:	01/30/2007	Application #:	10769549	Filing Dt:	01/30/2004
Publication #:	US20050166849	Pub Dt:	08/04/2005
Title:	APPARATUS AND METHODS FOR PREVENTING ROTATIONAL SLIPPAGE BETWEEN A VERTICAL SHAFT AND A SUPPORT STRUCTURE FOR A SEMICONDUCTOR WAFER HOLDER

Patent #:	7022613	Issue Dt:	04/04/2006	Application #:	10786779	Filing Dt:	02/24/2004
Publication #:	US20040166683	Pub Dt:	08/26/2004
Title:	REDUCED CROSS-CONTAMINATION BETWEEN CHAMBERS IN A SEMICONDUCTOR PROCESSING TOOL

Patent #:	7427556	Issue Dt:	09/23/2008	Application #:	10799335	Filing Dt:	03/12/2004
Publication #:	US20040259333	Pub Dt:	12/23/2004
Title:	METHOD TO PLANARIZE AND REDUCE DEFECT DENSITY OF SILICON GERMANIUM

Patent #:	7238595	Issue Dt:	07/03/2007	Application #:	10800390	Filing Dt:	03/12/2004
Publication #:	US20040219735	Pub Dt:	11/04/2004
Title:	EPITAXIAL SEMICONDUCTOR DEPOSITION METHODS AND STRUCTURES

Patent #:	7022593	Issue Dt:	04/04/2006	Application #:	10800417	Filing Dt:	03/11/2004
Publication #:	US20040219767	Pub Dt:	11/04/2004
Title:	SIGE RECTIFICATION PROCESS

Patent #:	7118779	Issue Dt:	10/10/2006	Application #:	10841585	Filing Dt:	05/07/2004
Publication #:	US20040221807	Pub Dt:	11/11/2004
Title:	REACTOR SURFACE PASSIVATION THROUGH CHEMICAL DEACTIVATION

Patent #:	7029995	Issue Dt:	04/18/2006	Application #:	10871687	Filing Dt:	06/09/2004
Publication #:	US20050026400	Pub Dt:	02/03/2005
Title:	METHODS FOR DEPOSITING AMORPHOUS MATERIALS AND USING THEM AS TEMPLATES FOR EPITAXIAL FILMS BY SOLID PHASE EPITAXY

Patent #:	7289865	Issue Dt:	10/30/2007	Application #:	10892013	Filing Dt:	07/14/2004
Publication #:	US20060031788	Pub Dt:	02/09/2006
Title:	OPTIMIZATION ALGORITHM TO OPTIMIZE WITHIN SUBSTRATE UNIFORMITIES

Patent #:	7248931	Issue Dt:	07/24/2007	Application #:	10892697	Filing Dt:	07/15/2004
Publication #:	US20040258514	Pub Dt:	12/23/2004
Title:	SEMICONDUCTOR WAFER POSITION SHIFT MEASUREMENT AND CORRECTION

Patent #:	7208354	Issue Dt:	04/24/2007	Application #:	10897985	Filing Dt:	07/23/2004
Publication #:	US20050054175	Pub Dt:	03/10/2005
Title:	DEPOSITION OF SILICON GERMANIUM ON SILICON-ON-INSULATOR STRUCTURES AND BULK SUBSTRATES

Patent #:	7514372	Issue Dt:	04/07/2009	Application #:	10898021	Filing Dt:	07/23/2004
Publication #:	US20050051795	Pub Dt:	03/10/2005
Title:	EPITAXIAL GROWTH OF RELAXED SILICON GERMANIUM LAYERS

Patent #:	7449071	Issue Dt:	11/11/2008	Application #:	10903083	Filing Dt:	07/30/2004
Publication #:	US20050011458	Pub Dt:	01/20/2005
Title:	WAFER HOLDER WITH PERIPHERAL LIFT RING

Patent #:	7202166	Issue Dt:	04/10/2007	Application #:	10910551	Filing Dt:	08/03/2004
Publication #:	US20050106893	Pub Dt:	05/19/2005
Title:	SURFACE PREPARATION PRIOR TO DEPOSITION ON GERMANIUM

Patent #:	7273799	Issue Dt:	09/25/2007	Application #:	10918547	Filing Dt:	08/12/2004
Publication #:	US20050048745	Pub Dt:	03/03/2005
Title:	DEPOSITION OVER MIXED SUBSTRATES

Patent #:	8152922	Issue Dt:	04/10/2012	Application #:	10929348	Filing Dt:	08/30/2004
Publication #:	US20050092247	Pub Dt:	05/05/2005
Title:	GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR

Patent #:	7253084	Issue Dt:	08/07/2007	Application #:	10933978	Filing Dt:	09/03/2004
Publication #:	US20060051940	Pub Dt:	03/09/2006
Title:	DEPOSITION FROM LIQUID SOURCES

Patent #:	7585752	Issue Dt:	09/08/2009	Application #:	10963043	Filing Dt:	10/12/2004
Publication #:	US20050064684	Pub Dt:	03/24/2005
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	7020981	Issue Dt:	04/04/2006	Application #:	10977323	Filing Dt:	10/29/2004
Publication #:	US20050241176	Pub Dt:	11/03/2005
Title:	REACTION SYSTEM FOR GROWING A THIN FILM

Patent #:	6980734	Issue Dt:	12/27/2005	Application #:	10986237	Filing Dt:	11/09/2004
Publication #:	US20050094989	Pub Dt:	05/05/2005
Title:	LAMP FILAMENT DESIGN

Patent #:	7115521	Issue Dt:	10/03/2006	Application #:	10993024	Filing Dt:	11/18/2004
Publication #:	US20050092235	Pub Dt:	05/05/2005
Title:	EPITAXIAL SEMICONDUCTOR DEPOSITION METHODS AND STRUCTURES

Patent #:	7648579	Issue Dt:	01/19/2010	Application #:	11057111	Filing Dt:	02/11/2005
Publication #:	US20050193952	Pub Dt:	09/08/2005
Title:	SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSITION

Patent #:	7147720	Issue Dt:	12/12/2006	Application #:	11059188	Filing Dt:	02/15/2005
Publication #:	US20050145180	Pub Dt:	07/07/2005
Title:	NON-CONTACT COOL-DOWN STATION FOR WAFERS

Patent #:	7329593	Issue Dt:	02/12/2008	Application #:	11067307	Filing Dt:	02/25/2005
Publication #:	US20050191826	Pub Dt:	09/01/2005
Title:	GERMANIUM DEPOSITION

Patent #:	7159846	Issue Dt:	01/09/2007	Application #:	11112166	Filing Dt:	04/22/2005
Publication #:	US20050184270	Pub Dt:	08/25/2005
Title:	SLIT VALVE FOR A SEMICONDUCTOR PROCESSING SYSTEM

Patent #:	8317921	Issue Dt:	11/27/2012	Application #:	11124329	Filing Dt:	05/06/2005
Publication #:	US20050205010	Pub Dt:	09/22/2005
Title:	IN SITU GROWTH OF OXIDE AND SILICON LAYERS

Patent #:	7186582	Issue Dt:	03/06/2007	Application #:	11124340	Filing Dt:	05/06/2005
Publication #:	US20050208740	Pub Dt:	09/22/2005
Title:	PROCESS FOR DEPOSITION OF SEMICONDUCTOR FILMS

Patent #:	7405453	Issue Dt:	07/29/2008	Application #:	11132096	Filing Dt:	05/17/2005
Publication #:	US20050212119	Pub Dt:	09/29/2005
Title:	INCORPORATION OF NITROGEN INTO HIGH K DIELECTRIC FILM

Patent #:	7396415	Issue Dt:	07/08/2008	Application #:	11144510	Filing Dt:	06/02/2005
Publication #:	US20060275546	Pub Dt:	12/07/2006
Title:	APPARATUS AND METHODS FOR ISOLATING CHEMICAL VAPOR REACTIONS AT A SUBSTRATE SURFACE

Patent #:	7790556	Issue Dt:	09/07/2010	Application #:	11148721	Filing Dt:	06/09/2005
Publication #:	US20050233529	Pub Dt:	10/20/2005
Title:	INTEGRATION OF HIGH K GATE DIELECTRIC

Patent #:	7285500	Issue Dt:	10/23/2007	Application #:	11179256	Filing Dt:	07/12/2005
Publication #:	US20050250302	Pub Dt:	11/10/2005
Title:	THIN FILMS AND METHODS OF MAKING THEM

Patent #:	7479460	Issue Dt:	01/20/2009	Application #:	11210441	Filing Dt:	08/23/2005
Publication #:	US20070049056	Pub Dt:	03/01/2007
Title:	SILICON SURFACE PREPARATION

Patent #:	7629270	Issue Dt:	12/08/2009	Application #:	11212503	Filing Dt:	08/24/2005
Publication #:	US20060110943	Pub Dt:	05/25/2006
Title:	REMOTE PLASMA ACTIVATED NITRIDATION

Patent #:	8211230	Issue Dt:	07/03/2012	Application #:	11333127	Filing Dt:	01/17/2006
Publication #:	US20060266289	Pub Dt:	11/30/2006
Title:	REACTION SYSTEM FOR GROWING A THIN FILM

Patent #:	7687383	Issue Dt:	03/30/2010	Application #:	11343244	Filing Dt:	01/30/2006
Publication #:	US20060205194	Pub Dt:	09/14/2006
Title:	METHODS OF DEPOSITING ELECTRICALLY ACTIVE DOPED CRYSTALLINE SI-CONTAINING FILMS

Patent #:	7816236	Issue Dt:	10/19/2010	Application #:	11343264	Filing Dt:	01/30/2006
Publication #:	US20060234504	Pub Dt:	10/19/2006
Title:	SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS

Patent #:	7438760	Issue Dt:	10/21/2008	Application #:	11343275	Filing Dt:	01/30/2006
Publication #:	US20060240630	Pub Dt:	10/26/2006
Title:	METHODS OF MAKING SUBSTITUTIONALLY CARBON-DOPED CRYSTALLINE SI-CONTAINING MATERIALS BY CHEMICAL VAPOR DEPOSITION

100

Patent #:	7837795	Issue Dt:	11/23/2010	Application #:	11352738	Filing Dt:	02/10/2006
Publication #:	US20060130743	Pub Dt:	06/22/2006
Title:	LOW TEMPERATURE LOAD AND BAKE

Assignor

ASM AMERICA, INC.

Exec Dt:

12/15/2020

Assignee

ASM IP HOLDING B.V.

VERSTERKERSTRAAT 8

ALMERE, NETHERLANDS 1322 AP

Correspondence name and address
	KNOBBE MARTENS OLSON & BEAR LLP
	2040 MAIN STREET
	14TH FLOOR
	IRVINE, CA 92614

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