Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 011855/0282 | |
| Pages: | 6 |
| | Recorded: | 06/04/2001 | | |
| Conveyance: | MERGER (SEE DOCUMENT FOR DETAILS). |
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Total properties:
6
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08791024
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Filing Dt:
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01/27/1997
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Title:
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MODEL BASED TEMPERATURE CONTROLLER FOR SEMICONDUCTOR THERMAL PROCESSORS
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09386565
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Filing Dt:
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08/31/1999
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Title:
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TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09386567
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Filing Dt:
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08/31/1999
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Title:
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TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09386678
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Filing Dt:
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08/31/1999
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Title:
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TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09387001
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Filing Dt:
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08/31/1999
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Title:
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TEMPERATURE CONTROL SYSTEM FOR A THERMAL REACTOR
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09599357
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Filing Dt:
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06/20/2000
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Title:
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RUN-TO-RUN CONTROLLER FOR USE IN MICROELECTRONIC FABRICATION
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Assignee
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| 15 ELIZABETH DRIVE |
| CHELMSFORD, MASSACHUSETTS 01824 |
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Correspondence name and address
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BROWN, RUDNICK, FREED & GESMER, P.C.
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MARK S. LEONARDO, ESQ.
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ONE FINANCIAL CENTER
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BOSTON, MA 02111
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