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Reel/Frame:	029134/0283			Pages:	16
		Recorded:	10/16/2012
Attorney Dkt #:	390-014150-US (STU)
Conveyance:	BILL OF SALE

Total properties: 43

Patent #:	7210246	Issue Dt:	05/01/2007	Application #:	10985727	Filing Dt:	11/10/2004
Publication #:	US20050120578	Pub Dt:	06/09/2005
Title:	METHODS AND SYSTEMS FOR HANDLING A WORKPIECE IN VACUUM-BASED MATERIAL HANDLING SYSTEM

Patent #:	7458763	Issue Dt:	12/02/2008	Application #:	10985834	Filing Dt:	11/10/2004
Publication #:	US20050111938	Pub Dt:	05/26/2005
Title:	MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM

Patent #:	7422406	Issue Dt:	09/09/2008	Application #:	10985839	Filing Dt:	11/10/2004
Publication #:	US20050118009	Pub Dt:	06/02/2005
Title:	STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8439623	Issue Dt:	05/14/2013	Application #:	11382491	Filing Dt:	05/10/2006
Publication #:	US20060263177	Pub Dt:	11/23/2006
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	8403613	Issue Dt:	03/26/2013	Application #:	11681822	Filing Dt:	03/05/2007
Publication #:	US20080014055	Pub Dt:	01/17/2008
Title:	BYPASS THERMAL ADJUSTER FOR VACUUM SEMICONDUCTOR PROCESSING

Patent #:	7792350	Issue Dt:	09/07/2010	Application #:	11682306	Filing Dt:	03/05/2007
Publication #:	US20070285673	Pub Dt:	12/13/2007
Title:	WAFER CENTER FINDING

Patent #:	7959403	Issue Dt:	06/14/2011	Application #:	11846290	Filing Dt:	08/28/2007
Publication #:	US20080085173	Pub Dt:	04/10/2008
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	8812150	Issue Dt:	08/19/2014	Application #:	11876869	Filing Dt:	10/23/2007
Publication #:	US20080219808	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8267632	Issue Dt:	09/18/2012	Application #:	11876876	Filing Dt:	10/23/2007
Publication #:	US20080219809	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8602716	Issue Dt:	12/10/2013	Application #:	11876896	Filing Dt:	10/23/2007
Publication #:	US20080219812	Pub Dt:	09/11/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8696298	Issue Dt:	04/15/2014	Application #:	11876902	Filing Dt:	10/23/2007
Publication #:	US20080124194	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	8313277	Issue Dt:	11/20/2012	Application #:	11876915	Filing Dt:	10/23/2007
Publication #:	US20080124197	Pub Dt:	05/29/2008
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULES

Patent #:	10444749	Issue Dt:	10/15/2019	Application #:	11877058	Filing Dt:	10/23/2007
Publication #:	US20080155443	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8639365	Issue Dt:	01/28/2014	Application #:	11877071	Filing Dt:	10/23/2007
Publication #:	US20080163094	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8639489	Issue Dt:	01/28/2014	Application #:	11877096	Filing Dt:	10/23/2007
Publication #:	US20080155442	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877170	Filing Dt:	10/23/2007
Publication #:	US20080155444	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8775148	Issue Dt:	07/08/2014	Application #:	11877180	Filing Dt:	10/23/2007
Publication #:	US20080163095	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8612198	Issue Dt:	12/17/2013	Application #:	11877191	Filing Dt:	10/23/2007
Publication #:	US20080155445	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8972029	Issue Dt:	03/03/2015	Application #:	11877203	Filing Dt:	10/23/2007
Publication #:	US20080155446	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8473270	Issue Dt:	06/25/2013	Application #:	11877214	Filing Dt:	10/23/2007
Publication #:	US20080155447	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7769482	Issue Dt:	08/03/2010	Application #:	11877228	Filing Dt:	10/23/2007
Publication #:	US20080155448	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7899562	Issue Dt:	03/01/2011	Application #:	11877242	Filing Dt:	10/23/2007
Publication #:	US20080155449	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	NONE	Issue Dt:		Application #:	11877264	Filing Dt:	10/23/2007
Publication #:	US20080163096	Pub Dt:	07/03/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	7945348	Issue Dt:	05/17/2011	Application #:	11877303	Filing Dt:	10/23/2007
Publication #:	US20080155450	Pub Dt:	06/26/2008
Title:	METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Patent #:	8672605	Issue Dt:	03/18/2014	Application #:	12025477	Filing Dt:	02/04/2008
Publication #:	US20080187417	Pub Dt:	08/07/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	8500388	Issue Dt:	08/06/2013	Application #:	12025516	Filing Dt:	02/04/2008
Publication #:	US20080187418	Pub Dt:	08/07/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	8197177	Issue Dt:	06/12/2012	Application #:	12025541	Filing Dt:	02/04/2008
Publication #:	US20080232947	Pub Dt:	09/25/2008
Title:	SEMICONDUCTOR WAFER HANDLING AND TRANSPORT

Patent #:	8434989	Issue Dt:	05/07/2013	Application #:	12030902	Filing Dt:	02/14/2008
Publication #:	US20080131237	Pub Dt:	06/05/2008
Title:	Batch Wafer Alignment

Patent #:	7894657	Issue Dt:	02/22/2011	Application #:	12032341	Filing Dt:	02/15/2008
Publication #:	US20080147333	Pub Dt:	06/19/2008
Title:	WAFER CENTER FINDING

Patent #:	7859685	Issue Dt:	12/28/2010	Application #:	12032489	Filing Dt:	02/15/2008
Publication #:	US20080231866	Pub Dt:	09/25/2008
Title:	WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES

Patent #:	8442667	Issue Dt:	05/14/2013	Application #:	12032733	Filing Dt:	02/18/2008
Publication #:	US20080147580	Pub Dt:	06/19/2008
Title:	APPLICATIONS OF NEURAL NETWORKS

Patent #:	8950998	Issue Dt:	02/10/2015	Application #:	12106975	Filing Dt:	04/21/2008
Publication #:	US20080260500	Pub Dt:	10/23/2008
Title:	BATCH SUBSTRATE HANDLING

Patent #:	10586722	Issue Dt:	03/10/2020	Application #:	12131024	Filing Dt:	05/30/2008
Publication #:	US20080298936	Pub Dt:	12/04/2008
Title:	VACUUM SUBSTRATE STORAGE

Patent #:	8178829	Issue Dt:	05/15/2012	Application #:	12195095	Filing Dt:	08/20/2008
Publication #:	US20090095886	Pub Dt:	04/16/2009
Title:	WAFER PRESENCE DETECTOR WITH END EFFECTORS HAVING OPTICAL COUPLERS AND FIBERS

Patent #:	8029225	Issue Dt:	10/04/2011	Application #:	12206382	Filing Dt:	09/08/2008
Publication #:	US20090067958	Pub Dt:	03/12/2009
Title:	STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8029226	Issue Dt:	10/04/2011	Application #:	12239717	Filing Dt:	09/26/2008
Publication #:	US20090087286	Pub Dt:	04/02/2009
Title:	SEMICONDUCTOR MANUFACTURING SYSTEMS

Patent #:	7988399	Issue Dt:	08/02/2011	Application #:	12260818	Filing Dt:	10/29/2008
Publication #:	US20090053016	Pub Dt:	02/26/2009
Title:	MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8424703	Issue Dt:	04/23/2013	Application #:	12434330	Filing Dt:	05/01/2009
Publication #:	US20090272743	Pub Dt:	11/05/2009
Title:	SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS

Patent #:	8807905	Issue Dt:	08/19/2014	Application #:	13158883	Filing Dt:	06/13/2011
Publication #:	US20120148374	Pub Dt:	06/14/2012
Title:	LINEAR SEMICONDUCTOR PROCESSING FACILITIES

Patent #:	8523507	Issue Dt:	09/03/2013	Application #:	13248386	Filing Dt:	09/29/2011
Publication #:	US20120020759	Pub Dt:	01/26/2012
Title:	SEMICONDUCTOR MANUFACTURING SYSTEMS

Patent #:	8944738	Issue Dt:	02/03/2015	Application #:	13248600	Filing Dt:	09/29/2011
Publication #:	US20120014769	Pub Dt:	01/19/2012
Title:	STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM

Patent #:	8870514	Issue Dt:	10/28/2014	Application #:	13616683	Filing Dt:	09/14/2012
Publication #:	US20130121792	Pub Dt:	05/16/2013
Title:	SEMICONDUCTOR MANUFACTURING PROCESS MODULE

Patent #:	8634633	Issue Dt:	01/21/2014	Application #:	13617333	Filing Dt:	09/14/2012
Publication #:	US20130085595	Pub Dt:	04/04/2013
Title:	WAFER CENTER FINDING WITH KALMAN FILTER

Assignor

BLUESHIFT TECHNOLOGIES, INC.

Exec Dt:

01/27/2010

Assignee

BROOKS AUTOMATION, INC.

15 ELIZABETH DRIVE

CHELMSFORD, MASSACHUSETTS 01824

Correspondence name and address
	PERMAN & GREEN, LLP
	99 HAWLEY LANE
	STRATFORS, CT 06614

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