Patent Assignment Details
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Reel/Frame: | 010758/0290 | |
| Pages: | 3 |
| | Recorded: | 04/17/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09550268
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Filing Dt:
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04/17/2000
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Title:
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Using a dummy frame pattern to improve CD control VSB E-Beam exposure system and the proximity effect of laser beam exposure system and Gaussian E-Beam exposure system
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVE. 3 |
HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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