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Patent Assignment Details

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Reel/Frame:	009386/0292			Pages:	39
		Recorded:	08/07/1998
Conveyance:	REIMBURSEMENT AND SECURITY AGREEMENT

Total properties: 19

Patent #:	4804007	Issue Dt:	02/14/1989	Application #:	07043852	Filing Dt:	04/29/1987
Title:	CLEANING APPARATUS

Patent #:	4869278	Issue Dt:	09/26/1989	Application #:	07144515	Filing Dt:	01/15/1988
Title:	MEGASONIC CLEANING APPARATUS

Patent #:	4854337	Issue Dt:	08/08/1989	Application #:	07197867	Filing Dt:	05/24/1988
Title:	APPARATUS FOR TREATING WAFERS UTILIZING MEGASONIC ENERGY

Patent #:	4998549	Issue Dt:	03/12/1991	Application #:	07272501	Filing Dt:	11/16/1988
Title:	MEGASONIC CLEANING APPARATUS

Patent #:	5037481	Issue Dt:	08/06/1991	Application #:	07482086	Filing Dt:	02/15/1990
Title:	MEGASONIC CLEANING METHOD

Patent #:	5090432	Issue Dt:	02/25/1992	Application #:	07598426	Filing Dt:	10/16/1990
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM

Patent #:	5148823	Issue Dt:	09/22/1992	Application #:	07598909	Filing Dt:	10/16/1990
Title:	SINGLE CHAMBER MEGASONIC ENERGY CLEANER

Patent #:	5286657	Issue Dt:	02/15/1994	Application #:	07809799	Filing Dt:	12/18/1991
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM

Patent #:	5365960	Issue Dt:	11/22/1994	Application #:	08042889	Filing Dt:	04/05/1993
Title:	MEGASONIC TRANSDUCER ASSEMBLY

Patent #:	5539995	Issue Dt:	07/30/1996	Application #:	08213599	Filing Dt:	03/16/1994
Title:	CONTINUOUS FLOW VAPOR DRYER SYSTEM

Patent #:	5556479	Issue Dt:	09/17/1996	Application #:	08275807	Filing Dt:	07/15/1994
Title:	METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS

Patent #:	5534076	Issue Dt:	07/09/1996	Application #:	08316940	Filing Dt:	10/03/1994
Title:	MEGASONIC CLEANING SYSTEM

Patent #:	5656097	Issue Dt:	08/12/1997	Application #:	08361139	Filing Dt:	12/21/1994
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	6039059	Issue Dt:	03/21/2000	Application #:	08724518	Filing Dt:	09/30/1996
Title:	WAFER CLEANING SYSTEM

Patent #:	5908509	Issue Dt:	06/01/1999	Application #:	08908330	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	5996595	Issue Dt:	12/07/1999	Application #:	08908345	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	5950645	Issue Dt:	09/14/1999	Application #:	08910033	Filing Dt:	08/11/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

Patent #:	6125551	Issue Dt:	10/03/2000	Application #:	09040176	Filing Dt:	03/17/1998
Title:	GAS SEAL AND SUPPORT FOR ROTATING SEMICONDUCTOR PROCESSOR

Patent #:	6122837	Issue Dt:	09/26/2000	Application #:	09103930	Filing Dt:	06/24/1998
Title:	CENTRIFUGAL WAFER PROCESSOR AND METHOD

Assignor

Exec Dt:

08/03/1998

Assignee

949 SOUTH COAST DRIVE, SUITE 650

COSTA MESA, CALIFORNIA 92626

Correspondence name and address
	O'MELVENY & MYERS LLP
	THOMAS BAXTER
	400 SOUTH HOPE STREET
	LOS ANGELES, CA 90017

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