Total properties:
18
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Patent #:
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Issue Dt:
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11/12/1991
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Application #:
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07335185
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Filing Dt:
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04/07/1989
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Title:
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SEMICONDUCTOR TRANSDUCER OR ACTUATOR UTILIZING CORRUGATED SUPPORTS
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Patent #:
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Issue Dt:
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10/22/1991
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Application #:
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07369899
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Filing Dt:
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06/22/1989
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Title:
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SINGLE DIAPHRAGM TRANSDUCER WITH MULTIPLE SENSING ELEMENTS
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Patent #:
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Issue Dt:
|
04/14/1992
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Application #:
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07370364
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Filing Dt:
|
06/22/1989
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Title:
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SELF-TESTABLE MICRO-ACCELEROMETER AND METHOD
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Patent #:
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Issue Dt:
|
12/03/1991
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Application #:
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07370545
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Filing Dt:
|
06/23/1989
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Title:
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SEMICONDUCTOR MICROACTUATOR
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Patent #:
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Issue Dt:
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05/11/1993
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Application #:
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07753194
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Filing Dt:
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08/30/1991
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Title:
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SEMICONDUCTOR TRANSDUCER OR ACTUATOR UTILIZING CORRUGATED SUPPORTS
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Patent #:
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Issue Dt:
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05/26/1992
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Application #:
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07753607
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Filing Dt:
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08/30/1991
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Title:
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SEMICONDUCTOR TRANSDUCER OR ACTUATOR UTILIZING CORRUGATED SUPPORTS
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Patent #:
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Issue Dt:
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01/05/1993
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Application #:
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07753608
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Filing Dt:
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08/30/1991
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Title:
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SEMICONDUCTOR TRANSDUCER OR ACTUATOR UTILIZING CORRUGATED SUPPORTS
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|
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Patent #:
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|
Issue Dt:
|
12/21/1993
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Application #:
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07891354
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Filing Dt:
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05/29/1992
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Title:
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BIMETALLIC DIAPHRAGM WITH SPLIT HINGE FOR MICROACTUATOR
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Patent #:
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|
Issue Dt:
|
02/09/1993
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Application #:
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07905219
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Filing Dt:
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06/29/1992
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Title:
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SINGLE DIAPHRAGM TRANSDUCER WITH MULTIPLE SENSING ELEMENTS
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Patent #:
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|
Issue Dt:
|
10/19/1993
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Application #:
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07915792
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Filing Dt:
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07/17/1992
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Title:
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SELF-TESTABLE MICRO-ACCELEROMETER
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|
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Patent #:
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|
Issue Dt:
|
07/12/1994
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Application #:
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07941997
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Filing Dt:
|
09/08/1992
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Title:
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GROOVE WIDTH TRIMMING
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Patent #:
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|
Issue Dt:
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08/16/1994
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Application #:
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08023188
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Filing Dt:
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02/25/1993
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Title:
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MICROMACHINING PROCESS FOR MAKING PERFECT EXTERIOR CORNER IN AN ETCHABLE SUBSTRATE
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Patent #:
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Issue Dt:
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08/29/1995
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Application #:
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08138349
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Filing Dt:
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10/18/1993
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Title:
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SELF-TESTABLE MICRO-ACCELEROMETER AND METHOD
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Patent #:
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|
Issue Dt:
|
04/02/1996
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Application #:
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08189948
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Filing Dt:
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02/01/1994
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Title:
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VERTICALLY MOUNTED ACCELEROMETER CHIP
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Patent #:
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Issue Dt:
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07/09/1996
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Application #:
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08479247
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Filing Dt:
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06/07/1995
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Title:
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PULSED THERMAL FLOW SENSOR SYSTEM
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Patent #:
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|
Issue Dt:
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04/01/1997
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Application #:
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08569402
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Filing Dt:
|
12/06/1995
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Title:
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SIDE SURFACE MOUNTED ACCELEROMETER ASSEMBLY
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Patent #:
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|
Issue Dt:
|
10/20/1998
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Application #:
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08671428
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Filing Dt:
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06/27/1996
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Title:
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MICROMACHINED CAPILLARY ELECTROPHORESIS DEVICE
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Patent #:
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|
Issue Dt:
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06/18/2002
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Application #:
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09324342
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Filing Dt:
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06/02/1999
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Title:
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METHODS FOR WAFER TO WAFER BONDING USING MICROSTRUCTURES
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