Patent Assignment Details
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| Reel/Frame: | 010483/0301 | |
| Pages: | 4 |
| | Recorded: | 12/15/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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09464297
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Filing Dt:
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12/15/1999
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Title:
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PROCESS FOR ETCHING A CONTROLLABLE THICKNESS OF OXIDE ON AN INTEGRATED CIRCUIT STRUCTURE ON A SEMICONDUCTOR SUBSTRATE USING NITROGEN PLASMA AND PLASMA AND AN RF BIAS APPLIED TO THE SUBSTRATE
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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RALPH R. VESELI
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INTELLECTUAL PROPERTY LAW DEPARTMENT
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1551 MCCARTHY BOULEVARD M/S D-106
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MILPITAS, CA 95035
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