Patent Assignment Details
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Reel/Frame: | 012105/0303 | |
| Pages: | 2 |
| | Recorded: | 08/20/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09933506
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Filing Dt:
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08/20/2001
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Publication #:
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Pub Dt:
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03/14/2002
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Title:
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MULTI-BEAM EXPOSURE METHOD
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Assignee
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69115 HEIDELBERG |
KURFURSTEN, ANLAGE 52-60, GERMANY |
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Correspondence name and address
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HILL & SIMPSON P.C.
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BRETT A. VALIQUET
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233 S. WACKER DRIVE
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85TH FLOOR SEARS TOWER
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CHICAGO, IL 60606
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