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Patent Assignment Details
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Reel/Frame:012540/0309   Pages: 3
Recorded: 01/25/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/20/2004
Application #:
10054962
Filing Dt:
01/25/2002
Publication #:
Pub Dt:
07/31/2003
Title:
METHOD FOR CONTROLLING AND MONITORING A CHEMICAL MECHANICAL POLISHING PROCESS
Assignors
1
Exec Dt:
07/21/2001
2
Exec Dt:
01/04/2002
3
Exec Dt:
12/28/2001
4
Exec Dt:
12/28/2001
5
Exec Dt:
12/27/2001
Assignee
1
SCIENCE-BASED INDUSTRIAL PARK
NO.16 LI-HSIN ROAD
HSINCHU, TAIWAN R.O.C
Correspondence name and address
LOWE HAUPTMAN GILMAN & BERNER (22429)
BENJAMIN J. HAUPTMAN
1700 DIAGONAL ROAD, SUITE 310
ALEXANDRIA, VIRGINIA 22314

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