Patent Assignment Details
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| Reel/Frame: | 009666/0320 | |
| Pages: | 4 |
| | Recorded: | 12/23/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/06/2001
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Application #:
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09164823
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Filing Dt:
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10/01/1998
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Title:
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METHOD FOR PROVIDING COOPERATIVE RUN-TO-RUN CONTROL FOR MULTI-PRODUCT AND MULTI-PROCESS SEMICONDUCTOR FABRICATION
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Assignee
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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Correspondence name and address
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MERCHANT, GOULD, SMITH, ET AL.
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STEVEN R. FUNK
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3100 NORWEST CENTER
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90 SOUTH SEVENTH STREET
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MINNEAPOLIS, MN 55402
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