Patent Assignment Details
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Reel/Frame: | 021786/0336 | |
| Pages: | 3 |
| | Recorded: | 11/04/2008 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12287567
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Filing Dt:
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10/10/2008
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Publication #:
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Pub Dt:
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04/16/2009
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Title:
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Valve with sensor for process solution, and apparatus and method for treating substrate using the same
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Assignee
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#278, MOSI-RI, JIKSAN-EUP SEOBUK-GU, CHEONAN-SI |
CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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JEFFREY L. WILSON
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JENKINS, WILSON, TAYLOR & HUNT, P.A.
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SUITE 1200, UNIVERSITY TOWER
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3100 TOWER BOULEVARD
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DURHAM, NORTH CAROLINA 27707
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