Patent Assignment Details
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| Reel/Frame: | 014726/0339 | |
| Pages: | 5 |
| | Recorded: | 11/28/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10423827
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Filing Dt:
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04/25/2003
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Publication #:
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Pub Dt:
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10/28/2004
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Title:
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METHOD AND MARK FOR METROLOGY OF PHASE ERRORS ON PHASE SHIFT MASKS
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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QUIN C. HOENWARTH
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P.O. BOX 778
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BERKELEY, CA 94704-0778
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