Patent Assignment Details
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| Reel/Frame: | 018203/0340 | |
| Pages: | 3 |
| | Recorded: | 09/05/2006 | | |
| Attorney Dkt #: | MKSI.70US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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11136610
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Filing Dt:
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05/23/2005
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Publication #:
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Pub Dt:
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11/23/2006
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Title:
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METHOD AND APPARATUS FOR PREVENTING ALD REACTANTS FROM DAMAGING VACUUM PUMPS
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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STEFAN T. BUMP
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2026 CARIBOU DRIVE, SUITE 201
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FORT COLLINS, CO 80525
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