Patent Assignment Details
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Reel/Frame: | 013171/0362 | |
| Pages: | 4 |
| | Recorded: | 08/01/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10210315
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Filing Dt:
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08/01/2002
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Publication #:
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Pub Dt:
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02/05/2004
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Title:
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LOW TEMPERATURE PLASMA SI OR SIGE FOR MEMS APPLICATIONS
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Assignee
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1303 EAST ALGONQUIN ROAD |
SCHAUMBURG, ILLINOIS 60196 |
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Correspondence name and address
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MAYER FORTKORT & WILLIAMS, PC
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JOHN A. FORTKORT
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251 NORTH AVENUE WEST, 2ND FL.
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WESTFIELD, NJ 07090
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