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Reel/Frame:054366/0376   Pages: 3
Recorded: 11/13/2020
Attorney Dkt #:31198-169 CON2
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/29/2021
Application #:
16564743
Filing Dt:
09/09/2019
Publication #:
Pub Dt:
08/06/2020
Title:
METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
Assignors
1
Exec Dt:
09/29/2011
2
Exec Dt:
09/29/2011
Assignee
1
20 FORTUNE DRIVE
BILLERICA, MASSACHUSETTS 01821
Correspondence name and address
BURNS & LEVINSON LLP
125 HIGH STREET
BOSTON, MA 02110

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