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Patent Assignment Details
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Reel/Frame:017236/0378   Pages: 3
Recorded: 11/10/2005
Attorney Dkt #:263729US26
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/15/2011
Application #:
11270671
Filing Dt:
11/10/2005
Publication #:
Pub Dt:
05/11/2006
Title:
COMPONENTS FOR SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF
Assignors
1
Exec Dt:
10/17/2005
2
Exec Dt:
10/17/2005
3
Exec Dt:
10/17/2005
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-8481, JAPAN
Correspondence name and address
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST
1940 DUKE STREET
ALEXANDRIA, VA 22314

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