Total properties:
20
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Patent #:
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Issue Dt:
|
02/06/2001
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Application #:
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09313765
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Filing Dt:
|
05/18/1999
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Title:
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APPARATUS FOR DEPOSITING THIN FILMS ON SEMICONDUCTOR WAFER
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Patent #:
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|
Issue Dt:
|
05/25/2004
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Application #:
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09726977
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Filing Dt:
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11/30/2000
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Publication #:
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Pub Dt:
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09/26/2002
| | | | |
Title:
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THIN FILM DEPOSITION APPARATUS FOR SEMICONDUCTOR
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Patent #:
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|
Issue Dt:
|
08/20/2002
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Application #:
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09776004
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Filing Dt:
|
02/02/2001
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Publication #:
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Pub Dt:
|
11/22/2001
| | | | |
Title:
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SHOWERHEAD APPARATUS FOR RADICAL-ASSISTED DEPOSITION
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Patent #:
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|
Issue Dt:
|
09/28/2004
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Application #:
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09848533
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Filing Dt:
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05/03/2001
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Publication #:
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Pub Dt:
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01/24/2002
| | | | |
Title:
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ATOMIC LAYER DEPOSITION (ALD) THIN FILM DEPOSITION EQUIPMENT HAVING CLEANING APPARATUS AND CLEANING METHOD
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Patent #:
|
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Issue Dt:
|
02/08/2005
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Application #:
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09848577
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Filing Dt:
|
05/03/2001
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Publication #:
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Pub Dt:
|
01/03/2002
| | | | |
Title:
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REACTOR FOR DEPOSITING THIN FILM ON WAFER
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Patent #:
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Issue Dt:
|
06/17/2003
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Application #:
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09848579
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Filing Dt:
|
05/03/2001
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Publication #:
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Pub Dt:
|
05/02/2002
| | | | |
Title:
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APPARATUS AND METHOD FOR DEPOSITING THIN FILM ON WAFER USING ATOMIC LAYER DEPOSITION
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|
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Patent #:
|
|
Issue Dt:
|
06/03/2003
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Application #:
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10094571
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Filing Dt:
|
03/07/2002
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Publication #:
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Pub Dt:
|
07/18/2002
| | | | |
Title:
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APPARATUS AND METHOD FOR DEPOSITING THIN FILM ON WAFER USING ATOMIC LAYER DEPOSITION
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|
|
Patent #:
|
|
Issue Dt:
|
05/03/2005
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Application #:
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10102108
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Filing Dt:
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03/19/2002
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Publication #:
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|
Pub Dt:
|
09/19/2002
| | | | |
Title:
|
Plasma chemical vapor deposition apparatus
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|
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Patent #:
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|
Issue Dt:
|
01/16/2007
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Application #:
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10712876
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Filing Dt:
|
11/12/2003
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Publication #:
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|
Pub Dt:
|
06/03/2004
| | | | |
Title:
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METHOD OF DEPOSITING THIN FILM USING HAFNIUM COMPOUND
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|
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Patent #:
|
|
Issue Dt:
|
04/26/2005
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Application #:
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10804912
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Filing Dt:
|
03/19/2004
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Publication #:
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|
Pub Dt:
|
09/30/2004
| | | | |
Title:
|
THIN FILM DEPOSITION REACTOR
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|
|
Patent #:
|
|
Issue Dt:
|
08/12/2008
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Application #:
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11080237
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Filing Dt:
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03/14/2005
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Publication #:
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Pub Dt:
|
10/06/2005
| | | | |
Title:
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CHEMICAL VAPOR DEPOSITION METHOD
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|
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Patent #:
|
|
Issue Dt:
|
08/07/2007
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Application #:
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11205990
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Filing Dt:
|
08/17/2005
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Publication #:
|
|
Pub Dt:
|
02/23/2006
| | | | |
Title:
|
A DEPOSITION METHOD OF TIN THIN FILM HAVING A MULTI-LAYER STRUCTURE
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|
|
Patent #:
|
|
Issue Dt:
|
12/29/2009
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Application #:
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11260559
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Filing Dt:
|
10/27/2005
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Publication #:
|
|
Pub Dt:
|
07/06/2006
| | | | |
Title:
|
IN-SITU THIN-FILM DEPOSITION METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
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Application #:
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11571547
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Filing Dt:
|
01/02/2007
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Publication #:
|
|
Pub Dt:
|
02/21/2008
| | | | |
Title:
|
METHOD OF DEPOSITING THIN FILM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2014
|
Application #:
|
11770117
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Filing Dt:
|
06/28/2007
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Publication #:
|
|
Pub Dt:
|
01/03/2008
| | | | |
Title:
|
APPARATUS FOR SEMICONDUCTOR PROCESSING
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|
|
Patent #:
|
|
Issue Dt:
|
09/28/2010
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Application #:
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12301071
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Filing Dt:
|
11/17/2008
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Publication #:
|
|
Pub Dt:
|
04/09/2009
| | | | |
Title:
|
METHOD OF DEPOSITING CHALCOGENIDE FILM FOR PHASE-CHANGE MEMORY
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12669498
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Filing Dt:
|
01/18/2010
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Publication #:
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Pub Dt:
|
07/29/2010
| | | | |
Title:
|
APPARATUS, METHOD FOR DEPOSITING THIN FILM ON WAFER AND METHOD FOR GAP-FILLING TRENCH USING THE SAME
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|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
12902850
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Filing Dt:
|
10/12/2010
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Publication #:
|
|
Pub Dt:
|
04/14/2011
| | | | |
Title:
|
SOLAR CELL AND METHOD OF FABRICATING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
07/08/2014
|
Application #:
|
12936563
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Filing Dt:
|
10/06/2010
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Publication #:
|
|
Pub Dt:
|
02/03/2011
| | | | |
Title:
|
METHOD OF FORMING CHALCOGENIDE THIN FILM
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13054072
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Filing Dt:
|
01/13/2011
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Publication #:
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|
Pub Dt:
|
05/19/2011
| | | | |
Title:
|
CLEANING METHOD OF APPARATUS FOR DEPOSITING CARBON CONTAINING FILM
|
|