Patent Assignment Details
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Reel/Frame: | 011637/0385 | |
| Pages: | 84 |
| | Recorded: | 01/02/2001 | | |
Conveyance: | NAME CHANGE |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/22/2001
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Application #:
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09667765
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Filing Dt:
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09/22/2000
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Title:
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End point window assembly in an etching apparatus for fabricating semiconductor devices
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Assignee
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SAN 136-1, AMI-RI, BUBAL-EUB, ICHON-SHI |
KYOUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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BIRCH, STEWART, KOLASCH & BIRCH, LLP
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TERRY L. CLARK
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P.O. BOX 747
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FALLS CHURCH, VA 22040-0747
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